Method for preparing SiC coating on surface of graphite crucible by using in-situ reaction method

A graphite crucible and in-situ reaction technology, which is applied in the field of SiC coating, can solve the problems of long coating cycle and complex method, and achieve the effects of improving service life, simple process and preventing reaction.

Inactive Publication Date: 2014-05-14
DALIAN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, these methods are relatively complicated or the cycle of preparing the coating is relatively long

Method used

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  • Method for preparing SiC coating on surface of graphite crucible by using in-situ reaction method
  • Method for preparing SiC coating on surface of graphite crucible by using in-situ reaction method
  • Method for preparing SiC coating on surface of graphite crucible by using in-situ reaction method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0033] Embodiment 1 in-situ reaction method prepares the SiC coating on graphite crucible surface

[0034] The graphite crucible for coating is buried in the silicon powder in the graphite crucible for heat generation, and placed in a supersonic frequency induction furnace. After being heated by supersonic frequency, the graphite crucible for coating and the silicon powder react in situ. A SiC coating with uniform thickness is formed on the surface, such as figure 1 , the specific method includes the following steps:

[0035] ① Grind the crucible for coating with sandpaper until the surface is smooth, and the sequence of using sandpaper is 200#, 600#, 1000#, 2000#;

[0036] ②The polished coating is buried in the silicon powder in the graphite crucible for heating with a graphite crucible to obtain the pre-reaction material;

[0037] ③ place the pre-reaction material in step ② in the supersonic frequency induction heating furnace, cover the graphite crucible for heating tight...

Embodiment 2

[0042] The mensuration of the thermal oxidation resistance of embodiment 2 SiC coating graphite crucible

[0043] First, the temperature of the tube furnace (a furnace capable of long-term heating and heat preservation) is raised to 700°C. The SiC-coated graphite crucible and the uncoated graphite crucible of the present invention are placed in a tube furnace, and the two ends of the tube furnace heating quartz tube are not sealed so that they are in direct contact with the air. The graphite crucible with SiC coating and the graphite crucible without coating were kept in a tube furnace for 2 hours. After the heat preservation was completed, they were taken out and weighed with an electronic balance, and the mass loss rate was calculated. The main reason for the mass loss of the graphite crucible is the oxidation reaction with the oxygen in the air, and the less the mass loss rate, the stronger the oxidation resistance at high temperature, and vice versa, the weaker the oxidati...

Embodiment 3

[0044] The mensuration of the thermal shock resistance performance of embodiment 3 SiC coating graphite crucible

[0045] First, the temperature of the tube furnace (a furnace capable of long-term heating and heat preservation) is raised to 700°C. The SiC-coated graphite crucible and the uncoated graphite crucible of the present invention are placed in a tube furnace, and the two ends of the tube furnace heating quartz tube are not sealed so that they are in direct contact with the air. The graphite crucible with SiC coating and the graphite crucible without coating of the present invention are kept in a tube furnace for 2 hours, and taken out after the heat preservation is completed. After it was cooled to room temperature, the SiC-coated graphite crucible and the uncoated graphite crucible were placed in the tube furnace again, kept at 700°C for 2 hours in the tube furnace, and taken out after the heat preservation was completed. Repeat this six times. After six cycles of th...

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Abstract

The invention provides a method for preparing a SiC coating on the surface of a graphite crucible by using an in-situ reaction method. The method comprises the following steps: burying a graphite crucible for the coating into silicon powder inside a graphite crucible for heating, so as to obtain a pre-action material, putting the pre-action material into a superaudio sensing heating furnace, and reacting for 60-90 minutes at 1,300 DEG C on the presence of inert gases. According to the method, the SiC coating which is uniform in thickness is generated through solid phase on the surface of the graphite crucible through in-site reaction, the method is simple in process, easy to control and beneficial for industrial production. The SiC coating prepared by using the method provided by the invention is solidly combined with a substrate of the graphite crucible, because of the SiC coating, the graphite crucible is effectively prevented from being oxidized, and the oxidation resistance and the thermal impact resistance of the graphite crucible are improved, so that the service life of the graphite crucible is prolonged, and no other impurities are introduced.

Description

technical field [0001] The invention relates to a method for preparing a SiC coating on the surface of a graphite crucible by an in-situ reaction method, and belongs to the technical field of coating preparation. Background technique [0002] The impurity elements in polysilicon are inseparable from the crucible used in the smelting process. How to manufacture a crucible that can introduce as few impurities as possible, prevent adhesion during the silicon smelting process, and can be reused many times is crucial to improving the quality of solar cells and reducing solar energy. cost has a significant impact. Therefore, forming a coating on the surface of the crucible to improve the performance of the crucible has very important application value. [0003] Forming a layer of SiC coating on the inner surface of the graphite crucible can hinder the reaction between the crucible substrate and the molten silicon, weaken the adhesion behavior between the silicon and the crucible,...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B41/87
Inventor 谭毅游小刚李佳艳
Owner DALIAN UNIV OF TECH
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