Aluminum oxide polishing solution for alloy polishing and preparation method thereof
A technology of alumina and polishing fluid, which is applied to polishing compositions containing abrasives, etc., can solve problems such as scratches and insufficient removal rate, and achieve the effect of simple formula and cheap and easy-to-obtain raw materials
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Embodiment 1
[0019] Embodiment 1: a kind of aluminum oxide polishing liquid that is used for alloy polishing, comprises each component of following mass percentage content:
[0020]
[0021] The surfactant is polyacrylic acid.
[0022] The alumina is α-alumina, and the average particle diameter of the alumina is 200 nanometers.
[0023] The corrosion inhibitor is disodium hydrogen phosphate.
[0024] The pH regulator is a mixture of triethylamine and diaminetetraacetic acid.
[0025] Use above-mentioned material to make the preparation method of the aluminum oxide polishing fluid of described alloy polishing, comprise the steps:
[0026] 1) Weigh each component separately according to the formula;
[0027] 2) Add the surfactant polyacrylic acid into the deionized water, stir evenly to obtain mixture 1;
[0028] 3) Then add the corrosion inhibitor disodium hydrogen phosphate to mixture 1, stir well to obtain mixture 2;
[0029] 4) Adding a pH adjuster to the mixture 2 to adjust the ...
Embodiment 2
[0030] Embodiment 2: a kind of aluminum oxide polishing liquid that is used for alloy polishing, comprises each component of following mass percentage content:
[0031]
[0032] The surfactant is a mixture of polyacrylic acid and sodium lauryl sulfate.
[0033] The alumina is α-alumina, and the average particle diameter of the alumina is 500 nanometers.
[0034] The corrosion inhibitor is disodium hydrogen phosphate.
[0035] The pH regulator is diisobutylamine.
[0036] Use above-mentioned material to make the preparation method of the aluminum oxide polishing fluid of described alloy polishing, comprise the steps:
[0037] 1) Weigh each component separately according to the formula;
[0038] 2) Add the surfactant into the deionized water, stir evenly to obtain mixture 1;
[0039] 3) Then add the corrosion inhibitor disodium hydrogen phosphate to mixture 1, stir well to obtain mixture 2;
[0040] 4) Add a pH adjuster to the mixture 2, adjust the pH value to 9-10, and ...
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Abstract
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