Chemical deposition preparation method of piezoelectric composite metal electrode

Abstract

The invention relates to a chemical deposition preparation method of a piezoelectric composite metal electrode. The chemical deposition preparation method particularly aims at a PZT ceramic and polymer coexisting composite material and comprises the following preparation steps: preparing a piezoelectric composite, cleaning, removing oil, wetting, carrying out primary coarsening, reducing, carrying out secondary coarsening, activating a colloid target, peptizing, carrying out chemical plating and passivating. According to the chemical deposition preparation method, a metal coating chemically deposited on the surface of the piezoelectric composite has a bright surface, is fine in crystallization, can uniformly cover the surfaces of ceramics and polymers and has good binding force with the ceramics and polymers. An adopted medium and low temperature technology is capable of ensuring that the piezoelectric composite metal electrode is free of deformation and material separation. The chemical deposition preparation method does not need expensive equipment and is low in cost and suitable for large scale production.

Description

technical field [0001] The invention relates to a method for preparing piezoelectric composite material metal electrodes by chemical deposition, and belongs to the field of research and development of composite material electrodes. Background technique [0002] Lead zirconate titanate (PZT) ceramic / polymer composite has the characteristics of high piezoelectric coefficient, low density, low acoustic impedance and good mechanical quality. As a transducer element, it is used in underwater acoustic transducers, biomedical imaging, ultrasonic It has always dominated the field of engineering. In piezoelectric composite transducers, electrodes have a great influence on the performance and service life of components. Therefore, developing a preparation method to obtain a metal electrode with good bonding force and uniform distribution on the composite material has become the key to the good performance of the transducing component. [0003] At present, magnetron sputtering film d...

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Problems solved by technology

Document 1 [1] A method for preparing composite material electrodes by magnetron sputtering is disclosed, but the technology has the following disadvantages: (1) high requirements on equipment and site; (2) low utilization rate and production efficiency of electrode raw materials; (3) obtaining The electrode has poor bonding force with the piezoelectric composite material

However, inorganic acids can only roughen PZT ceramics, but cannot effectively roughen polymer materials.

Therefore, by roughening the piezoelectric composite material by this method, the chemically deposited nickel film can obtain good bonding force with PZT ceramics, but cannot obtain good bonding force with polymer materials.

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