Tungsten oxide and zirconium oxide high-temperature solar selective absorption coating and production method thereof

An absorption coating, selective technology, applied in the field of solar energy utilization, to achieve the effect of excellent high temperature stability and good thermal stability

Active Publication Date: 2014-08-27
北京天瑞星光热技术有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Commonly used materials are mainly Cr-Cr oxide, Ni-Al 2 o 3 、Mo-Al 2 o 3 , Ti / Al / Si nitrides or (and) oxides, etc. However, these materials are only used in a vacuum environment of 300 ° C to 400 ° C, for higher temperatures 500 ° C ~ 600 ° C vacuum and 450 ° C ~ 500 ° C non-vacuum Coatings for environmental use have not been reported in China

Method used

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  • Tungsten oxide and zirconium oxide high-temperature solar selective absorption coating and production method thereof
  • Tungsten oxide and zirconium oxide high-temperature solar selective absorption coating and production method thereof

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preparation example Construction

[0026] A kind of WO provided by the present invention x / ZrO x The preparation method of high temperature solar energy selective absorbing coating, such as figure 2 shown, including the following steps:

[0027] Step 1: preparing the first infrared emitting layer on the substrate;

[0028] Adopt pure metal target DC or intermediate frequency magnetron sputtering method, the pure metal target is Cu target or Ag target (purity is 99.99%), prepared with Ar gas as the sputtering gas, the substrate is made of high speed steel, and the vacuum chamber is placed before sputtering The background vacuum is pre-pumped to 4×10 -3 ~5×10 -3 Pa, the inert gas Ar gas is introduced as the sputtering atmosphere, the Ar gas flow rate is 1000-1400sccm, the sputtering distance is adjusted to 130-150mm, and the sputtering pressure is adjusted to 2×10 -1 ~4×10 -1 Pa, turn on the power supply of the sputtering target of the pure metal target, adjust the sputtering voltage to 380-450V, and the ...

Embodiment 1

[0037] This embodiment provides a WO x / ZrO x Solar energy selective absorption coating, the coating includes three coatings, divided into the first layer of infrared reflection layer, the second layer of absorption layer, the third layer of anti-reflection layer, the thickness of the first layer of Cu film is 170nm, the second layer The total thickness is 360nm, where the first sublayer WO x +ZrO x The film thickness is 200nm, the second sublayer WO x +ZrO x The film thickness is 160nm, ZrO in the first sublayer x The volume percentage is 60%, the rest is WO x ; the second sublayer ZrO x The volume percentage is 40%, the rest is WO x ; the third layer of ZrO x The film thickness was 120 nm. Preparation of the above WO x / ZrO x The method for solar energy selective absorbing coating, comprises the following steps:

[0038] Step 1: preparing the first infrared emitting layer on the substrate;

[0039] The Cu target with a purity of 99.99% is selected, and the base ...

Embodiment 2

[0049] This embodiment provides a WO x / ZrO x Solar energy selective absorption coating, the coating includes three coatings, divided into the first layer of infrared reflection layer, the second layer of absorption layer, the third layer of anti-reflection layer, the thickness of the first layer of Cu film is 140nm, the second layer The total thickness is 300nm, where the first sublayer WO x +ZrO x The film thickness is 150nm, the second sublayer WO x +ZrO x The film thickness is 150nm, ZrO in the first sublayer x The volume percentage is 55%, the rest is WO x ; the second sublayer ZrO 2 The volume percentage is 35%, the rest is WO x ; the third layer of ZrO 2 The film thickness was 150 nm. Preparation of the above WO x / ZrO x The method for solar energy selective absorbing coating, comprises the following steps:

[0050] Step 1: preparing the first infrared emitting layer on the substrate;

[0051] The Cu target with a purity of 99.99% is selected, and the base ...

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Abstract

The invention discloses a tungsten oxide and zirconium oxide high-temperature solar selective absorption coating and a production method thereof. The tungsten oxide and zirconium oxide high-temperature solar selective absorption coating comprises three layers of films; a first layer of infrared reflective layer is a cuprum or argentum film which is located on the surface of a substrate, wherein the thickness of the cuprum or argentum film is 100 to 300 nm; a second layer of absorption layer comprises two sub-layers which are tungsten oxide and zirconium oxide films; the thickness of the first sub-layer and the thickness of the second sub-layer are both 150 to 300 nm; the volume percent of zirconium oxide in the first sub-layer is 50 to 75% and the rest is tungsten oxide; the volume percent of zirconium oxide in the second sub-layer is 30 to 50% and the rest is tungsten oxide; the first sub-layer is adjacent to the first layer of infrared reflective layer; the second sub-layer is adjacent to a third layer of antireflection layer; the third layer of antireflection layer is a zirconium oxide film, wherein the thickness of the zirconium oxide film is 120 to 200 nm. According to the tungsten oxide and zirconium oxide high-temperature solar selective absorption coating and the production method thereof, the high-temperature stability is excellent and the good thermal stability can be maintained under the 500 to 600 DEG C high-temperature vacuum conditions or under the 400 DEG C atmospheric conditions.

Description

technical field [0001] The invention belongs to the technical field of solar energy utilization, in particular to a WO x / ZrO x High temperature solar selective absorbing coating and preparation method thereof. Background technique [0002] The solar spectrum selective absorption coating has high absorptivity in the visible-near-infrared band and low emissivity in the infrared band, which is the key to improving the efficiency of light-to-heat conversion for solar collectors. With the continuous development of solar heat utilization requirements and technology, the application range of solar collector tubes has been developed from low temperature applications (≤100°C) to medium temperature applications (100°C-350°C) and high temperature applications (350°C-500°C). Meet the requirements of medium and high temperature applications such as seawater desalination and solar power generation. The selective absorption coating needs to have good high temperature thermal stability ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F24J2/48B32B15/04B32B9/04C23C14/35C23C14/14C23C14/08C23C14/58
CPCY02E10/40
Inventor 曹明刚刘雪莲张秀廷席晓敏陈步亮邓宁
Owner 北京天瑞星光热技术有限公司
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