Phase-locked multi-channel strip discharging array carbon dioxide laser

Abstract

The invention discloses a construction method and device for a phase-locked multi-channel strip discharging array carbon dioxide laser, and relates to the field of optical engineering and laser application. According to the method and device, the laser obtains high-power phase-locked carbon dioxide laser output through a plurality of rectangular strips according to symmetrical structure configuration and radio-frequency discharging excitation. The method is characterized by comprising the steps of placing a quartz discharging tube or a glass discharging tube on the symmetry axis of a system, enabling the rectangular strips to intersect with one another, symmetrically placing the rectangular strips on the symmetry axis of the system, arranging only one output mirror, enabling the two surfaces of the output mirror to be two parallel plane mirrors or plane convex mirrors, and arranging a convergence system behind the output mirror, wherein a beam of convergent high-power carbon dioxide laser light with the good coherence is obtained after convergence of array parallel beams output from the array carbon dioxide laser through the convergence system. The system is characterized in that oscillation light beams inside the strips are excited by the laser light through convex reflection of the output mirror or the first reflection face of a concave mirror behind the output mirror, wherein the laser light is generated by the discharging tube on the symmetry axis of the system under the action of two mirror cavities on the axis. Therefore, the obtained carbon dioxide laser beams are good in coherence.

Description

Technical field [0001] The invention relates to laser processing in the fields of optical engineering and laser manufacturing, and mainly includes a method for constructing a phase-locked multi-channel slat discharge array carbon dioxide laser by a combination of an array slat discharge carbon dioxide laser system, a toric mirror, a concave mirror and an output mirror, and Device; the phase-locked multi-channel slat discharge array carbon dioxide laser output beam is converged by the converging system to obtain a small coherent laser beam, which can be directly used for metal and non-metal material processing, which is important in the field of laser processing equipment. Background technique [0002] In the field of laser processing, the energy of the laser is converged into a very high-density laser beam in the form of light. When such a beam reaches the surface of the processed material, it will generate huge heat, and the temperature of the processed material surface is rapi...

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Problems solved by technology

[0002] In the field of laser processing, the energy of the laser is condensed into a very high-density laser beam in the form of light. When such a beam reaches the surface of the processed material, it will generate huge heat. At this time, the temperature of the processed material surface rapidly It is raised and melted to achieve the purpose of processing; therefore, in order to improve processing efficiency, fast and high-precision processing of metal and non-metal materials requires lasers to have higher output power and better beam quality; used for processing Lasers have successively experienced pulsed lasers represented by ruby ​​lasers and neodymium glass lasers, continuous wave lasers represented by Nd:YAG lasers and carbon dioxide lasers; in recent years, international laser processing systems mainly use Nd:YAG lasers and carbon dioxide lasers. The output value of continuous wave lasers represented by lasers has reached 4 billion US dollars, of which the output value of carbon dioxide laser systems exceeds 2 billion US dollars; carbon dioxide laser processing systems mainly include axial fast flow type, cross flow type and planar waveguide type The electro-optical conversion efficiency of carbon dioxide laser is above 20%, the output laser beam is fundamental mode Gaussian beam, the output power exceeds 600W, it is mainly used for cutting, welding, drilling, etc. of metal and non-metal materials; cross-flow carbon dioxide laser has a large gain volume , the output power can reach 10,000 watts, but the laser mode is relatively poor, mainly used for laser welding and surface treatment, etc.; the output power of the planar waveguide carbon dioxide laser can reach more than 800W, and it is directly mounted on the machine tool due to its light weight and small size. Processing; among the diffusion-cooled slab carbon dioxide lasers, Rofin's DC series continuous wave 8KW diffusion-cooled slab carbon dioxide laser is the main representative of the current technological level of diffusion-cooled slab carbon dioxide lasers; the above lasers have their own advantages and disadvantages, and the axis Fast-flow and cross-flow carbon dioxide lasers have high output power and are mainly used in laser metal and non-metal processing fields. However, due to the larger volume of flow-type lasers than other lasers, the processing machine head and laser can only be separated. Use Inconvenient; compared with flow-type carbon dioxide lasers, planar waveguide-type carbon dioxide lasers are small in size and can be directly mounted on processing machine tools, but the structure of the laser limits the output power of the laser; in view of the fact that the output power of planar carbon dioxide lasers is limited, in order to obtain High-power laser output, the number of plates can be increased to increase the volume of the active medium, thereby increasing the output power; the plates are placed radially and symmetrically on the symmetry axis of the system, which facilitates the extraction of laser energy and better control of the laser beam , by properly selecting the output mirror and the total reflection mirror, high-power laser output can be obtained, but since the beams have no fixed phase relationship with each other, the coherence of the beams converged by the converging system is poor, which is not conducive to high-precision laser processing; therefore , using the phase locking method to phase lock this kind of symmetrical radial array slab laser, can make each beam converged by the converging system into a thin carbon dioxide laser beam with good coherence and beam quality, It is conducive to high-precision and rapid laser processing; therefore, now There are technical flaws that need to be improved

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