NbN-Ag hard thin film and preparation method thereof

A kind of thin film and hard technology, which is applied in the field of NbN-Ag hard structure thin film and preparation, coating and its preparation, can solve the problems of poor friction and wear performance of multilayer film at high temperature
CN104032269AInactive Publication Date: 2014-09-10JIANGSU UNIV OF SCI & TECH
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
JIANGSU UNIV OF SCI & TECH
Publication Date
2014-09-10
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention relates to an NbN-Ag hard thin film and a preparation method thereof. The NbN-Ag hard thin film is characterized in that the molecular formula thereof is NbN-Ag; the thickness is 1-5 microns; the content of Ag is 0-50 at.%, and is greater than 0; a high-purity Nb target and a Ag target are used as targets; the NbN-Ag hard thin film is obtained by depositing the targets on a hard alloy or ceramic matrix through a double-target confocal radio-frequency response method; in the deposition, the vacuum degree is lower than 3.0*10-3 Pa; the deposition is performed using argon to start arcing and using nitrogen as reaction gas; the sputtering pressure is 0.3 Pa; the nitrogen-argon flow ratio is 10: (1-10); the sputtering power of the Nb target is 100-500 W; and the sputtering power of the Ag target is 0-150 W. The preparation method has high production efficiency; and the obtained thin film has high hardness and excellent friction and wear resistance, and can be used as a high-speed dry cut structural hard thin film.
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Description

technical field

[0001] The invention relates to a coating and a preparation method thereof, in particular to a NbN-Ag hard structure thin film and a preparation method thereof, belonging to the technical field of ceramic coatings. Background technique

[0002] Transition metal nitrides, such as TiN, have high hardness, wear resistance and excellent corrosion resistance, and are also used in many industrial fields. With the rapid development of manufacturing technology, especially the emergence of high-speed cutting, dry cutting and other processes, higher requirements are put forward for the cutting performance of cutting tools. Compared with TiN thin films, NbN thin films have a series of excellent properties such as high chemical and thermal stability and high hardness. Therefore, research on NbN thin films has attracted increasing attention in recent years.

[0003] In recent years, multifunctional coatings formed by adding soft lubricating phases on hard wear-resistant ...

Claims

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