The invention discloses a method and
system for scribing a brittle ultrathin piece by a
water jet and
laser. According to the method, a
laser beam penetrates through a
water jet beam to focus on the surface of a workpiece; the distance between the center of the jet point, on the surface of the workpiece, of the
water jet beam and the center of the focus point, on the surface of the workpiece, of the
laser beam is equal to or smaller than 1-2.5 times the
radius of the focus point, on the surface of the workpiece, of the laser beam. The distance between an intersection point I and an intersection point II is equal to or smaller than 1-2.5 times the
radius of the focus point of the laser beam, wherein the intersection point I is the intersection point of the surface of the workpiece and the water jet beam generated by the jet
nozzle of the
system, and the intersection point II is the intersection point of the surface of the workpiece and the laser beam. The longitudinal center line of the jet
nozzle coincides with the center line of the laser beam. A
workbench is provided with a working cavity filled with water; a
water layer with a thickness of 0.5-1.5 mm is arranged on the surface of the workpiece on the top surface of a boss at the top of the
workbench; the overflow port of the working cavity is connected to a water tank; a water pump is used for pumping water in the water tank into the jet
nozzle to generate the water jet. According to the invention, the laser is used for laser ablating and scribing, and the water jet beam is used for cooling and washing a processed area, so that the effect that a processed surface is free from recast
layers,
residual stress and
micro cracks is achieved; the
processing efficiency is improved.