Preparation method for semiconductor nanowire orderly distributed in array mode
A technology of nanowire arrays and ordered arrays, which is applied in semiconductor/solid-state device manufacturing, semiconductor devices, nanotechnology, etc., can solve the problems of difficult preparation of nanowires and high cost, and achieve the effect of reducing power generation costs and improving photoelectric conversion efficiency
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[0020] see Figure 1-Figure 7 As shown, the present invention provides a method for preparing a semiconductor nanowire ordered array distribution, comprising the following steps:
[0021] Step 1: Clean a substrate 1 to obtain a polished substrate from which organic substances, heavy metals, and oxide layers have been removed. The material of the substrate 1 is silicon. Clean the silicon wafer of the substrate 1 in strict accordance with the degreasing and cleaning of the silicon wafer of the substrate 1. The steps of removing heavy metals and oxide layers are cleaned, and then the silicon wafer of the substrate 1 is blown dry with a nitrogen gun, and put into the sample box;
[0022] Step 2: An aluminum layer 2 with an adjustable thickness is vapor-deposited on the substrate 1, and the aluminum layer 2 is grown by thermal evaporation and magnetron sputtering. Choose the thickness according to your own needs, and vapor-deposit a layer of aluminum layer 2 with an adjustable thi...
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