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A kind of SICN ceramic wired passive temperature sensor and preparation method thereof

A temperature sensor, ceramic technology, applied in thermometers, thermometers with physical/chemical changes, instruments, etc., can solve the problems of wired active, difficult to withstand high temperature environment, low working temperature, punching and other problems

Active Publication Date: 2017-02-22
ZHONGKE RUNZI (CHONGQING) ENERGY SAVING TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a SiCN ceramic that can be used in high temperature and harsh environments in view of the technical problems of the existing temperature sensor that the temperature sensitive element has a low operating temperature, the wired active source is difficult to withstand the high temperature environment, and needs to be drilled. Wired passive temperature sensor and preparation method thereof

Method used

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  • A kind of SICN ceramic wired passive temperature sensor and preparation method thereof
  • A kind of SICN ceramic wired passive temperature sensor and preparation method thereof
  • A kind of SICN ceramic wired passive temperature sensor and preparation method thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0038] 1. Take 8g of polydimethylsilane and 0.8g of crosslinking agent and mix them evenly with magnetic stirring, then use ultrasonic vibration to remove the bubbles in the mixed solution to obtain a uniform mixed solution with less bubbles. During the heating and curing process, a smooth cylindrical master mold with a diameter of 12.7 mm was put into the mixed liquid, and the master mold was taken out after the mixed liquid solidified, and a PDMS mold with a cavity of the master mold size was obtained.

[0039] 2. Take 4g of polysilazane and 0.24g of I819 photoinitiator and mix, then put the mixed solution on a heatable magnetic stirrer and stir at 800 rad / min for 1 hour at 80°C to obtain a light yellow mixed solution.

[0040] 3. Add the stirred mixed solution into the PDMS mold, and then place it under a 250w ultraviolet lamp for crosslinking for 0.5h, and obtain a ceramic green body after crosslinking and curing.

[0041] 4. Sintering the ceramic green sheet. Sprinkle a ...

Embodiment 2

[0047] 1. Take 15g of polysilazane and pour it into a tin foil carton, then put it into a high-temperature tube furnace for thermal crosslinking. 2 Under the atmosphere, the temperature was raised from room temperature to 140 °C at a heating rate of 0.5 °C / min, kept at 140 °C for 1 hour, and then naturally cooled to room temperature to obtain light yellow solid polysilazane.

[0048] 2. Pour the uniformly mixed viscous light yellow liquid into a tin foil carton, and then put it into a high-temperature tube furnace for thermal crosslinking. 2 Under the atmosphere, the temperature was raised from room temperature to 140 °C at a heating rate of 0.5 °C / min, kept at 140 °C for 1 hour, and then naturally cooled to room temperature to obtain light yellow solid polysilazane.

[0049] 3. Ball mill the obtained light yellow solid polysilazane with a ball mill. The selected ball mill is QM-1SP2 planetary ball mill, the rotational speed during ball milling is 400rad / min, the ball milling...

Embodiment 3

[0057] 1. Take 10g of polysilazane and 0.6g of I819 photoinitiator and mix, then put the mixed solution on a heatable magnetic stirrer and stir at 800 rad / min for 1 hour at 80°C to obtain a light yellow mixed solution.

[0058] 2. Pour the obtained light yellow mixture into a tinfoil carton, and then place it under a 250w ultraviolet lamp for crosslinking for 0.5h. After crosslinking and solidification, a light yellow solid polysilazane is obtained.

[0059] 3. Ball mill the obtained light yellow solid polysilazane with a ball mill. The selected ball mill is QM-1SP2 planetary ball mill, the rotational speed during ball milling is 400rad / min, the ball milling time is 8h, and the rotation is reversed every half hour. Powder was obtained after ball milling.

[0060] 4. Take 1 g of the powder obtained after ball milling and directly put it into a heatable temperature-controlled circular mold with a diameter of 12.7 mm for heating and pressing, and hold the pressure at 20 MPa for ...

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Abstract

The invention discloses a SiCN ceramic wired passive temperature sensor and a preparation method thereof and relates to temperature sensors. The sensor is provided with a cylindrical amorphous state SiCN ceramic temperature-sensitive element, a resonant cavity, a coupling excitation port and a coplanar waveguide wire, wherein the temperature-sensitive element is arranged on the coplanar waveguide wire, a high temperature resistant metal layer wraps the surface of the temperature-sensitive element, the high temperature resistant metal layer forms the resonant cavity, the coupling excitation port is mounted on the side surface of the resonant cavity, and the resonant cavity is directly coupled with the coplanar waveguide wire through the coupling excitation port. Firstly, the cylindrical amorphous state SiCN ceramic temperature-sensitive element is prepared; a position of the side surface of the temperature-sensitive element, which corresponds to the coupling excitation port, is protected by polyimide tapes, then the metal layer is electroplated on the surface of the temperature-sensitive element to form the resonant cavity, and the polyimide tapes are removed to obtain the resonant cavity with the coupling excitation port on the side surface; the coplanar waveguide wire is prepared; the resonant cavity is placed on the coplanar waveguide wire, and the coupling excitation port and the coplanar waveguide wire are coupled, bonded and subjected to cross-linking solidity to obtain the SiCN ceramic wired passive temperature sensor.

Description

technical field [0001] The invention relates to a temperature sensor, in particular to a SiCN ceramic wired passive temperature sensor and a preparation method thereof. Background technique [0002] The operating temperature of smelting blast furnaces, nuclear power reactors and other equipment is usually greater than 1000°C, and the environment is harsh (high temperature, high pressure, high corrosion, high radiation, etc.). At present, most of the existing temperature sensor systems use optical fiber (J.H.Wo, Q.Z.Sun, H.Liu, et.al, Optical Fiber Technology 19(2013) 289-292) or low frequency active (M.A.Fonseca, J.M.English, and M.G.Allen , J.Microelectromech.Syst.11 (2002) 337-343) working method, can't operate normally in such harsh environment at all. The main reason is that the existing wired active temperature sensor system has problems such as the lack of high-temperature-resistant batteries and battery energy supply cycles, and cannot be installed in equipment such ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01K11/00
Inventor 余煜玺李燕罗珂伞海生
Owner ZHONGKE RUNZI (CHONGQING) ENERGY SAVING TECH CO LTD