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A kind of preparation method of sapphire substrate polishing liquid

A technology of sapphire substrate and polishing liquid, which is applied in the direction of polishing composition containing abrasives, etc., can solve the problems of easily scratched polishing sheet, low reuse rate, and many impurities in polishing liquid, and achieve low scratch rate and improved The effect of high yield rate and fast polishing rate

Active Publication Date: 2016-05-11
HEBEI YUTIAN HAOYUAN NANO MATERIAL
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Problems solved by technology

[0006] The present invention proposes a method for preparing a sapphire substrate polishing liquid, which solves the problems in the prior art that the polishing liquid has many impurities, is easy to scratch the polishing sheet, and has a low reuse rate

Method used

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Embodiment

[0032] A method for preparing a sapphire substrate polishing solution, the whole process is carried out in a class 10,000 clean room, and the specific steps are as follows:

[0033] (1) The airtight reaction tank is made of non-polluting acrylic material, and the airtight reaction tank is cleaned six times with ultra-pure water under vacuum negative pressure tumbling state before use.

[0034] (2) Use a 100-nanometer ceramic membrane filtration system to remove metal ions and other impurities in silica sol raw materials;

[0035] The above-mentioned silica sol is a silica sol with an average particle diameter of 85nm, a spherical colloidal particle shape, a dispersion degree of less than 0.001, and a Mohs hardness of 6.

[0036] (3) adding the above-mentioned filtered silica sol with a concentration of 49% in a closed reaction tank under vacuum negative pressure;

[0037] (4) under vacuum negative pressure state, guanidine carbonate accounting for 0.65% of the total weight of...

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Abstract

The present invention proposes a kind of preparation method of sapphire substrate polishing liquid, and its method step is as follows: adopt membrane filter equipment to remove metal ion and other impurity in silica sol raw material; % to 50% of the silica sol is added to the closed reaction tank through a 100-nanometer pleated filter element; the stabilizer is added to the closed reaction tank under vacuum negative pressure; The effect agent is added into the closed reaction tank; the liquid in the closed reaction tank is fully stirred for 60 minutes under the negative pressure tumbling state, and the filling is carried out after mixing evenly. The beneficial effects of the present invention are as follows: the alkaline sapphire substrate polishing liquid prepared by the method of the present invention has no corrosive effect on polishing equipment, and after the polishing liquid is used and treated, it can also be used as an additive for architectural coatings, which solves the problem of traditional acidic The polishing liquid is easy to gel, difficult to recycle and many other problems.

Description

technical field [0001] The invention relates to the technical field of polishing liquid preparation, in particular to a preparation method of a sapphire substrate polishing liquid. Background technique [0002] The polishing liquid is a water-soluble polishing agent without any sulfur, phosphorus, and chlorine additives. The polishing liquid has good oil removal, rust prevention, cleaning and gloss enhancement properties, and can make metal products beyond the original luster. Sapphire substrate polishing liquid is a high-purity low-metal ion polishing product produced by a special process using high-purity silicon powder as a raw material. It is mainly used for polishing sapphire substrates, and can also be widely used for various materials. Nanoscale high planarization polishing. [0003] For the production of LED chips, the selection of substrate materials is the primary consideration. The epitaxial layers of third-generation semiconductor GaN-based materials and device...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C09G1/02
Inventor 杜志伟
Owner HEBEI YUTIAN HAOYUAN NANO MATERIAL
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