Manufacturing method of metal film electrode based on ito heating plate
A manufacturing method and metal film technology, applied in metal material coating process, ion implantation plating, coating and other directions, can solve the problems of aging, peeling and heat generation of the silver paste, achieve uniform resistance distribution, avoid aging, Even heat generation effect
Inactive Publication Date: 2016-09-28
HEFEI UNIV OF TECH
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Problems solved by technology
At present, the electrodes of ITO panels are mainly made by coating conductive silver paste, but the conductive silver paste coated in this way is uneven, resulting in uneven current distribution and serious local heat generation.
And working for a long time will cause the aging and shedding of the conductive silver paste, which will affect the work of the LCD device
Method used
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[0019] Such as figure 1 , 2 Shown, the fabrication method based on the metal film electrode of ITO heater plate, comprises the following steps:
[0020] (1) First, ultrasonically treat the ITO substrate with acetone solution, absolute ethanol and deionized water for 10 minutes respectively; the concentration of the acetone solution is 99.5%, which is mainly to clean the organic matter on the ITO glass substrate, and absolute ethanol is mainly to clean The residual acetone solution and deionized water are used to clean the residual absolute ethanol and particles on the surface of the ITO substrate;
[0021] (2) Then use an oxygen plasma cleaning machine to clean for 7 minutes, so that the surface of the ITO substrate is cleaned;
[0022] (3) Then move the ITO substrate to the glove box, and fix the ITO substrate and mask in the glove box; the parameters of the glove box are: oxygen content <0.1ppm, water content <0.01ppm;
[0023] (4) Lay one side of the ITO substrate with t...
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The invention discloses a method for manufacturing a metal film electrode based on an ITO (Indium Tin Oxides) heating piece. According to the method, firstly, an ITO substrate is subjected to, in sequence, ultrasonic treatment with acetone solution for ten minutes, ultrasonic treatment with absolute ethyl alcohol for ten minutes, and ultrasonic treatment with deionized water for ten minutes; the ITO substrate is cleaned for seven minutes through an oxygen plasma cleaning machine, and therefore the surface of the ITO substrate is cleaned up; the ITO substrate is moved to a glove box; one face of the ITO substrate completely fits a mask plate; the ITO substrate and the mask plate are moved to a substrate frame in a vacuum cavity of a vacuum evaporation system; nitrogen gas in the vacuum chamber is pumped out, an electron beam with the power of 600 w is used for sputtering metal, the metal is heated to evaporate, meanwhile, a quartz vibrator of a film thickness gauge is used for detecting the sputtering rate, and when the rate can stably reach 20 angstrom / S, a baffle is opened; at the moment, metal molecules begin to be evaporated on the ITO substrate. The electrode provided by the invention is uniform in resistance distribution, the voltage drop is even, and therefore an ITO panel can evenly generate heat, organic matter like colloid is not used, and the aging phenomenon of the electrode is avoided.
Description
technical field [0001] The invention mainly relates to the field of making metal film electrodes, in particular to a method for making a metal film electrode based on an ITO heating sheet. Background technique [0002] In view of the situation that LCD (Liquid Crystal Display) cannot work at low temperature, the ITO (Indium Tin Oxides) glass panel is used as a heating plate, which is used as a heating element when the LCD is working, so that the LCD screen passes through the production of the ITO panel at low temperature. The temperature requirement when the heat arrives at work. At present, the electrodes of ITO panels are mainly made by coating conductive silver paste, but the conductive silver paste coated in this way is uneven, resulting in uneven current distribution and serious local heat generation. And working for a long time will lead to the aging and shedding of the conductive silver paste, which will affect the work of the LCD device. Contents of the invention ...
Claims
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IPC IPC(8): C23C14/04C23C14/18C23C14/24C23C14/46
Inventor 胡俊涛余承东程群宗艳凤梅文娟邓亚飞吕国强
Owner HEFEI UNIV OF TECH