Ultra-smooth plane grinding polishing device and method for online trimming flexible polishing pad

Abstract

The invention relates to an ultra-smooth plane grinding polishing device and method for online trimming a flexible polishing pad. The ultra-smooth plane grinding polishing device comprises a cluster magneto-rheological abrasive semi-fixed flexible polishing pad generating device, a workpiece clamping and intermittent adjusting mechanism and a flexible polishing pad real-time trimming device, wherein the cluster magneto-rheological abrasive semi-fixed flexible polishing pad generating device comprises an annular grinding disc, a cluster magnetic pole, a separation disc, a lower end cover and a rotating plate, the workpiece clamping and intermittent adjusting mechanism comprises an inner supporting ring, an outer supporting ring, a planetary gear, a movable cylinder, an upper end cover, a depth scale, a connection shaft, an expansion sleeve, an inner gear and an outer gear, and the flexible polishing pad real-time online trimming device comprises a trimming planetary gear and a magnetic pole. By adopting the ultra-smooth plane grinding polishing device, the whole process of grinding, coarse polishing and fine polishing of the workpiece under the situation that the magneto-rheological liquid is not replaced can be realized, the surface quality of the workpiece is good, and the machining efficiency is high; moreover, the surface and subsurface damage can be avoided, the cost is low, and the ultra-smooth plane grinding polishing device can be used for machining different optical elements and semiconductor substrates.

Description

technical field [0001] The invention relates to an ultra-smooth plane grinding and polishing device and method for on-line trimming of a flexible polishing pad, in particular to a constant-pressure optical element and semiconductor substrate plane grinding and polishing for real-time on-line trimming of an abrasive semi-fixed magnetorheological flexible polishing pad Devices and methods. Background technique [0002] Optical components (lenses and mirrors) are one of the core components of optical devices. To achieve good optical performance, the surface precision needs to be ultra-smooth (roughness Ra below 1nm), and the surface shape precision also has high requirements ( The shape accuracy reaches below 0.5 microns). In the LED field, single crystal silicon (Si), single crystal germanium (Ge), gallium arsenide (GaAs), single crystal silicon carbide (SiC) and single crystal sapphire (Al 2 o 3 ) etc. as semiconductor substrate materials also require an ultra-flat and ult...

AI Technical Summary

Problems solved by technology

However, the "polishing ribbon" and the surface of the workpiece belong to the "spot" local contact. In the process of processing, the entire surface can only be processed by controlling the "spot" and scanning along the workpiece surface according to a certain regular trajectory. The trajectory scanning process requires a lot of time. Causes low efficiency and difficult to guarantee machining shape accuracy

[0004] Since grinding and polishing belong to different processes, different processing devices and different abrasive working fluids are generally used for processing. The processing efficiency is low, and it is difficult to adapt to the high-speed development requirements of the electronic information manufacturing industry.

Images