Cutting tool made from cubic boron nitride-based sintered material
A cubic crystal boron nitride, boron nitride-based technology, applied in the manufacture of tools, workpieces, drilling accessories, etc., can solve problems such as insufficient chipping resistance and chipping resistance, and short tool life
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[0121] Production of cBN particles as raw material powder:
[0122] Process (I):
[0123] Using cBN particles with an average particle size of 0.5 to 8 μm as a base material, a thin film of Al is coated on it by the ALD method 2 o 3 Floor.
[0124] More specifically, cBN particles with an average particle diameter of 0.5 to 8 μm are charged in the furnace, the temperature in the furnace is raised to 350° C., and Al(CH 3 ) 3 gas, and H as a reaction gas 2 O gas, the following steps (1) to (4) are regarded as one cycle, and this cycle is repeated according to the target layer thickness (1 to 10 nm) shown in Table 1, thereby forming a thin film of Al on the surface of cBN particles. 2 o 3 Floor.
[0125] (1)Ar+Al(CH 3 ) 3 Gas inflow process
[0126] (2) Ar gas purging process
[0127] (3)Ar+H 2 O gas inflow process
[0128] (4) Ar gas purging process
[0129] Process (II):
[0130] Next, by the same ALD method, the Al formed on the surface of the cBN particle 2 o ...
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