Transparent electrode grid-control transverse PIN blue and purple photo-detector and method for manufacturing same
A transparent electrode and detector technology, applied in the field of blue-violet light detection, can solve the problems of low quantum efficiency of photodetectors, difficulty in absorbing long-wavelength light, and limitation of response speed, etc., and achieve high quantum efficiency, fast frequency response, and increased output The effect of capacitance
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[0030] Such as figure 1 As shown, the transparent electrode gated horizontal PIN blue-violet photodetector of this embodiment includes a P-type substrate 1. The P-type substrate 1 is provided with an N well 2 and a deep N well 3 formed by ion implantation and doping. The bottom of the well 2 is in contact with the deep N well 3 and an inverse P well 4 is formed on the upper part of the P-type substrate 1. The two sides of the inverse P well 4 are provided with N with a diffusion doping method to form a lateral gap arrangement. + Zone 5 and P + Zone 6 (N + Zone 5 and P + The lateral spacing of zone 6 is determined by the required light-receiving area), the anti-P well 4 is located in N + Zone 5 and P + The surface of the area between the regions 6 is covered with a gate oxide layer 41, the surface of the gate oxide layer 41 is covered with a transparent conductive film 42, and the transparent conductive film 42 is provided with gate electrodes G, N + Zone 5 is provided with anode ...
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