Reduce or eliminate nanotube defects in iii-nitride structures
A nanotube and nitride technology, applied in the field of nanotube defects, can solve problems such as limiting the efficiency of III-nitride devices
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[0017] figure 1 and 2 The formation of defect types referred to herein as nanotubes is illustrated. Nanotubes are particularly problematic defects due to their large size—typically a few microns long and tens or hundreds of angstroms in diameter. For example, in III-nitride materials, nanotubes may be at least 10 Å wide in some embodiments, and no greater than 500 Å wide in some embodiments. In some materials, such as SiC, the nanotubes can be 1 micron wide, or even wider. Nanotubes may be caused by impurities such as oxygen, silicon, magnesium, aluminum, and indium in the GaN film. The nanotubes may also be related to impurities or defects on the substrate surface, such as scratches, or the nanotubes may be present in the substrate itself and may continue from the substrate into the III-nitride material grown on the substrate. Nanotubes usually start at ~10 6 cm -2 Densities formed in III-Nitride devices are higher than the dislocation density in typical III-Nitride de...
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