Automatic mass-flow XeF2 gas supply device for multi-frequency blue-green laser
A gas supply and laser technology, applied in the direction of active medium materials, can solve the problems of inconvenient control and adjustment, long adjustment time, and small output gas flow, so as to increase the sublimation rate and XeF2 vapor pressure, realize automatic control, reduce Effect of warm-up time
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[0025] Such as figure 1 As shown, the XeF used in the present invention 2 Gas supply device, including main gas circuit unit, branch gas circuit unit, XeF 2 A gas generator 19, a mixing tube 20 and a control unit for controlling gas flow and switching valves; the main gas circuit unit includes a main gas source 17, a flow controller 13 and a main gas heater 15 connected by a pipeline and a valve 7; The branch gas circuit unit includes connecting the branch gas source 16, the flow controller 12 and the branch gas heater 14 through pipelines and valves 8 and 9;
[0026] wxya 2 The gas generator comprises a storage tank 6, an inner heating unit 5 and an outer heating unit 31, and the XeF placed in the storage tank 6 2 crystal 32, and sealed by a tank cover 35; the outer heating unit 31 is wrapped around the bottom and periphery of the storage tank 6, and the inner heating unit 5 is a plurality of U-shaped coils connected in series arranged at the bottom of the storage tank 6, ...
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