Wireless passive non-invasive MEMS intraocular pressure sensor and manufacturing method thereof

Abstract

The invention discloses a non-invasive wireless passive intraocular pressure sensor and a manufacturing method thereof. The intraocular pressure sensor comprises a flexible substrate layer, a first electrode layer, an intermediate layer, a second electrode layer and a flexible substrate layer, wherein a dielectric layer of a central capacitor is formed by a part of the intermediate layer, and a polar plate of the central capacitor is formed by corresponding parts of the first electrode layer and the second electrode layer; and the flexible substrate layers are prepared by using ParyleneC thin films, and the intermediate layer is prepared by using a PDMS material. The non-invasive wireless passive intraocular pressure sensor disclosed by the invention is simple and feasible in the whole set of process; the series connection between the capacitor and an inductor can be achieved by using extra edge capacitance, and a simple structure can be achieved; and a sensor electrode is simple to manufacture, the prepared electrode is low in resistivity, the acquisition of relatively high quality factors can be facilitated, and the signal-to-noise ratio of detection signals can be improved.

Description

technical field [0001] The invention relates to the field of microsensor processing, and more particularly relates to a wireless passive non-invasive MEMS intraocular pressure sensor and a manufacturing method thereof. Background technique [0002] Glaucoma is a disease characterized by optic nerve damage and visual field defect caused by pathological elevated intraocular pressure, and is the second leading irreversible blinding eye disease in the world. Elevation of intraocular pressure is an important index for diagnosis and treatment of glaucoma. Some patients had normal intraocular pressure tests during outpatient hours, but blindness due to glaucoma still occurred. The analysis found that the intraocular pressure of glaucoma patients fluctuated greatly within 24 hours (hours), and reached a peak at a certain time outside the clinic, such as sleep or early morning. Therefore, accurate and continuous intraocular pressure detection is very important for the diagnosis and...

AI Technical Summary

Problems solved by technology

The preparation of sensor electrodes usually adopts the etching copper foil method. Although a higher Q value can be guaranteed by selecting a thicker copper foil, patterning on a thin copper foil will easily cause the electrode to be disconnected and the operation is difficult. Increase the difficulty of the preparation process

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