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Extra-high sensitive gas absorption spectrum measuring system and method based on MEMS

A gas absorption and spectrum measurement technology, which is applied in the field of gas absorption spectrum measurement, can solve problems such as limitations, and achieve the effects of reducing volume and weight, reducing system volume, and low reflectivity

Inactive Publication Date: 2015-05-27
HEFEI ZHICHANG PHOTOELECTRIC TECH
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  • Abstract
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  • Application Information

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Problems solved by technology

However, the photoacoustic spectroscopy technology is limited by the application of various complex environments due to the influence of ambient noise and vibration.

Method used

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  • Extra-high sensitive gas absorption spectrum measuring system and method based on MEMS
  • Extra-high sensitive gas absorption spectrum measuring system and method based on MEMS
  • Extra-high sensitive gas absorption spectrum measuring system and method based on MEMS

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Embodiment Construction

[0039] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0040] Such as figure 1 As shown, a MEMS-based ultra-high sensitivity gas absorption spectroscopy measurement system includes a pump laser 1, a beam shaping device 2, a beam modulation device 3, an optical path cell 4, a first concave mirror 5, a second concave mirror 6, MEMS micro cantilever beam 7 , detection laser 8 , position sensitive detector 9 , pre-signal preprocessing device 10 , lock-in amplifier 11 , central processing unit 12 and pump laser control device 13 . The optical path cell 4 is used to accommodate the measured gas sample, and is provided with a light entrance 43, a light exit 44, an air inlet 45 and an air outlet 46, such as image 3 shown. The MEMS micro-cantilever beam 7 is made up of a base 73 and a double-layer structure fixed on the base 73, the double-layer structure includes a black silicon material layer 71 and a ...

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Abstract

The invention provides an extra-high sensitive gas absorption spectrum measuring system based on MEMS. The system comprises a pump laser, a beam modulation device, an optical path pool, a reflective focusing device, an MEMS micro-cantilever, a detection laser, a position sensitive detector, a lock phase amplifier and a central processor, wherein the optical path pool is used for accommodating a tested gas sample; the MEMS micro-cantilever consists of a base and a double-layered structure fixed on the base, and the double-layered structure comprises a black silicon material layer and a metal material layer which is formed on the black silicon material layer. The invention further provides a measuring method of the extra-high sensitive gas absorption spectrum measuring system. By adopting the MEMS technology, the measuring sensitivity is extremely improved and the spectrum measuring range is expanded. Moreover, the system is not sensitive to environmental noise and vibration, and the size and weight of the measuring system are hugely reduced, so that the measuring system can be portable or handheld.

Description

technical field [0001] The invention relates to the technical field of gas absorption spectrum measurement, in particular to a MEMS-based ultra-high sensitivity gas absorption spectrum measurement system and method. Background technique [0002] With the development of the economy, on the one hand, a large amount of smoke generated by transportation and industry enters the atmosphere, making the air pollution more and more serious; , so the analysis and measurement of harmful gases is particularly important. [0003] At present, the main technologies for analyzing and measuring gases are: thermal conductivity method, electrochemical method, gas chromatography and infrared absorption method. [0004] The thermal conductivity method is based on the principle that different gases have different thermal conductivity, and the content of some components is calculated by measuring the thermal conductivity of the mixed gas. The thermal conductivity method has a wide range of app...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/39G01N21/31
Inventor 董敬涛陈坚吴周令
Owner HEFEI ZHICHANG PHOTOELECTRIC TECH
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