Analysis system for determining impurity components in highly pure gases, and determination method thereof

Abstract

The invention discloses an analysis system for determining impurity components in highly pure gases, and a determination method thereof. The analysis system comprises a helium ionization detector, a hydrogen flame detector, seven valves, seven columns and three sample quantification rings, and the detection of many impurity components, such as nitrogen, hydrogen, oxygen / argon, carbon monoxide, carbon dioxide, methane, ethane / ethylene, acetylene and C3 hydrocarbon impurities in various highly pure gases, such as highly pure ammonia, highly pure oxygen, highly pure nitrogen and highly pure hydrogen is realized on the analysis system. The method allows impurities in the highly pure gases to be separated through chromatographic columns and to be detected through the helium ionization detector and the hydrogen flame detector by adjusting the opening or closure of the valves to obtain the determination data of the impurities. The analysis system can detect a variety of impurities in highly pure industrial gases, so the determination cost is reduced; and the method can satisfy the sensitivity requirement of highly pure gas analysis and the detection limit requirements of all impurity gases, and greatly increases the analysis efficiency.

Description

technical field [0001] The invention relates to an analysis system and a measurement method for measuring impurity components in high-purity gas. Background technique [0002] High-purity industrial gas is a term in the gas industry, and usually refers to a gas with a certain level of purity that can be achieved by modern purification technology. For different types of gases, the purity indicators are different. For example, for nitrogen, hydrogen, argon, and helium, it usually refers to a high-purity gas with a purity equal to or higher than 99.999%; for oxygen, a purity of 99.99% can be called high-purity Oxygen; for hydrocarbons, a gas with a purity of 99.99% can be considered a high-purity gas. In addition to permanent gases such as high-purity hydrogen, high-purity oxygen, and high-purity nitrogen, and rare gases such as high-purity helium, high-purity argon, and high-purity neon, it also includes high-purity methane, high-purity ethane, and other hydrocarbon gases, as...

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Problems solved by technology

[0005] It can be seen from the above table that the cost of instruments and equipment alone is about 2.4 million to complete the analysis of impurities in high-purity ammonia gas, and there are high requirements for the sensitivity and stability of the analysis equipment, otherwise it cannot meet the requirements for the determination of impurities in high-purity gases. Require

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