Analysis system for determining impurity components in highly pure gases, and determination method thereof

An analysis system and high-purity gas technology, which can be used in analytical materials, measuring devices, material separation, etc., can solve problems such as the inability to meet the requirements for the determination of impurity components in high-purity gases, and achieve the goal of reducing the cost of measurement and improving the efficiency of measurement and analysis. Effect

Active Publication Date: 2015-06-03
SHANGHAI BAOSTEEL IND TECHNOLOGICAL SERVICE
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  • Abstract
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Problems solved by technology

[0005] It can be seen from the above table that the cost of instruments and equipment alone is about 2.4 million to complete the analysis of impurities in high-purity ammonia gas, and the...

Method used

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  • Analysis system for determining impurity components in highly pure gases, and determination method thereof
  • Analysis system for determining impurity components in highly pure gases, and determination method thereof
  • Analysis system for determining impurity components in highly pure gases, and determination method thereof

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Embodiment Construction

[0021] like figure 1 As shown, the analysis system of the present invention for measuring impurity components in high-purity gas includes a ten-way valve V1, a first six-way valve V2, a second six-way valve V3, a third six-way valve V5, a fourth six-way valve V7, and a fourth six-way valve V7. One four-way valve V4, the second four-way valve V6, the first chromatographic column A1, the second chromatographic column A2, the third chromatographic column A3, the fourth chromatographic column A4, the fifth chromatographic column A5, the sixth chromatographic column A6, deoxygenation Column A7, the first sample quantitative loop B1, the second sample quantitative loop B2, the third sample quantitative loop B3, the helium ionization detector C1 and the hydrogen flame detector C2, the first port of the ten-way valve A1 is connected to the The input end of the second sample quantitative loop B2, the eighth port is connected to the output end of the second sample quantitative loop B2, ...

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Abstract

The invention discloses an analysis system for determining impurity components in highly pure gases, and a determination method thereof. The analysis system comprises a helium ionization detector, a hydrogen flame detector, seven valves, seven columns and three sample quantification rings, and the detection of many impurity components, such as nitrogen, hydrogen, oxygen/argon, carbon monoxide, carbon dioxide, methane, ethane/ethylene, acetylene and C3 hydrocarbon impurities in various highly pure gases, such as highly pure ammonia, highly pure oxygen, highly pure nitrogen and highly pure hydrogen is realized on the analysis system. The method allows impurities in the highly pure gases to be separated through chromatographic columns and to be detected through the helium ionization detector and the hydrogen flame detector by adjusting the opening or closure of the valves to obtain the determination data of the impurities. The analysis system can detect a variety of impurities in highly pure industrial gases, so the determination cost is reduced; and the method can satisfy the sensitivity requirement of highly pure gas analysis and the detection limit requirements of all impurity gases, and greatly increases the analysis efficiency.

Description

technical field [0001] The invention relates to an analysis system and a measurement method for measuring impurity components in high-purity gas. Background technique [0002] High-purity industrial gas is a term in the gas industry, and usually refers to a gas with a certain level of purity that can be achieved by modern purification technology. For different types of gases, the purity indicators are different. For example, for nitrogen, hydrogen, argon, and helium, it usually refers to a high-purity gas with a purity equal to or higher than 99.999%; for oxygen, a purity of 99.99% can be called high-purity Oxygen; for hydrocarbons, a gas with a purity of 99.99% can be considered a high-purity gas. In addition to permanent gases such as high-purity hydrogen, high-purity oxygen, and high-purity nitrogen, and rare gases such as high-purity helium, high-purity argon, and high-purity neon, it also includes high-purity methane, high-purity ethane, and other hydrocarbon gases, as...

Claims

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Application Information

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IPC IPC(8): G01N30/88G01N35/00
Inventor 杨四川黄晓
Owner SHANGHAI BAOSTEEL IND TECHNOLOGICAL SERVICE
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