AlN ceramic substrate thermal insulation structure four-unit array gas sensor and manufacturing method thereof

A gas sensor and isolation structure technology, applied in instruments, scientific instruments, measuring devices, etc., can solve the problems of poor thermal stability, complex film forming process, silicon-based thermal mismatch, etc., to improve thermal stability and reduce thermal conduction loss. , The effect of reducing heating power consumption

Inactive Publication Date: 2015-06-10
HARBIN UNIV OF SCI & TECH
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Problems solved by technology

[0003] The present invention aims to solve the problems of poor thermal stability of the current silicon-based micro-hot plate integrated array gas sensor, complex film-forming process of silicon-based micro-hot plate integrated array gas sensor, and thermal mismatch of silicon base at high temperature. A four-element array gas sensor with AlN ceramic base thermal isolation structure and its manufacturing method

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  • AlN ceramic substrate thermal insulation structure four-unit array gas sensor and manufacturing method thereof
  • AlN ceramic substrate thermal insulation structure four-unit array gas sensor and manufacturing method thereof
  • AlN ceramic substrate thermal insulation structure four-unit array gas sensor and manufacturing method thereof

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specific Embodiment approach 1

[0021] Specific implementation mode 1. Combination figure 1 , figure 2 , image 3 and Figure 4 Describe this embodiment mode, an AlN ceramic-based thermal isolation structure four-unit array gas sensor described in this embodiment mode, the sensor includes a rectangular aluminum nitride ceramic substrate 1 and four independent sensor units, the rectangular aluminum nitride ceramic The substrate 1 is divided into four parts along the two midlines of the rectangle by four independent sensor units, and the four independent sensor units are respectively arranged in the four parts; the main body of each independent sensor unit is rectangular, and the two independent sensors located above The units are arranged oppositely, and the two independent sensor units located below are arranged oppositely;

[0022] Each independent sensor unit includes two heating electrodes 2, two signal electrodes 3, four isosceles trapezoidal thermal isolation holes 4, a rectangular heater 5 and a si...

specific Embodiment approach 2

[0027] Specific Embodiment 2. This embodiment is a further description of a four-unit array gas sensor with an AlN ceramic base thermal isolation structure described in Specific Embodiment 1. The platinum film width a3 of the heater head 5-1 is 0.05mm-0.1 mm, the two heating electrodes 2 include electrode sheets and electrode leads, the electrode sheets are square, the side length a1 is 0.25mm-0.5mm, the platinum film width a2 of the electrode leads is 0.1mm-0.2mm, and the width of the peaks on both sides a4 is 0.025mm-0.05mm;

[0028]The platinum film width x4 of the two signal detection heads 6-1 of the signal detector 6 is 0.05mm-0.1mm, one of the two signal detection heads 6-1 is a rectangular opening, and the other is linear, and the linear The signal detection head is arranged in the opening rectangle number detection head, the linear signal detection head is parallel to the long side of the opening rectangle number detection head, and the distance x5 between the straigh...

specific Embodiment approach 3

[0030] Specific Embodiment 3. This embodiment is a further description of a four-element array gas sensor with an AlN ceramic-based thermal isolation structure described in Specific Embodiment 1. The thickness of the shaped aluminum nitride ceramic substrate 1 is 0.1mm-0.25mm , the length W of the short side is 4mm-8mm, and the length L of the long side is 5mm-10mm.

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Abstract

The invention relates to a gas sensor and a manufacturing method thereof, in particular to an AlN ceramic substrate thermal insulation structure four-unit array gas sensor and a manufacturing method thereof. The problems that an existing silicon substrate micro-hotplate integrated array gas sensor is poor in hot stability, the silicon substrate hotplate integrated array gas sensing film forming technology is complex, and hot mismatching exists on a silicon substrate at high temperature are solved. The AlN ceramic substrate thermal insulation structure four-unit array gas sensor comprises a rectangular aluminum nitride ceramic substrate and four independent sensor units. Each independent sensor unit comprises two heating electrodes, two signal electrodes, four isosceles trapezoid heat insulation holes, a rectangular heater and a signal detector. The manufacturing method of the AlN ceramic substrate thermal insulation structure four-unit array gas sensor comprises the steps that the aluminum nitride ceramic substrate is cleaned by an acetone solution and an alcoholic solution at first, then is dried, glued and photoetched, and is coated with a film and placed into the acetone solution to dissolve photoresist, laser etching is carried out, the aluminum nitride ceramic substrate is placed into a diluted hydrochloric acid solution to be cleaned, and finally annealing treatment is carried out, so that the sensor is obtained. The AlN ceramic substrate thermal insulation structure four-unit array gas sensor is applicable to measuring gas compositions.

Description

technical field [0001] The invention relates to a gas sensor and a manufacturing method thereof. Background technique [0002] The current silicon-based micro-hotplate integrated array gas sensor process is relatively mature, but there are problems such as poor thermal stability, complex film formation process, and thermal mismatch of the film base at high temperature. Contents of the invention [0003] The present invention aims to solve the problems of poor thermal stability of the current silicon-based micro-hot plate integrated array gas sensor, complex film-forming process of silicon-based micro-hot plate integrated array gas sensor, and thermal mismatch of silicon base at high temperature. An AlN ceramic-based thermal isolation structure four-element array gas sensor and a manufacturing method thereof. [0004] A four-unit array gas sensor with an AlN ceramic base thermal isolation structure according to the present invention, the sensor includes a rectangular alumi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/00
Inventor 赵文杰刘丛宁施云波于明岩周真
Owner HARBIN UNIV OF SCI & TECH
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