Phase modulation type micromirror array programmable fresnel zone plate and zooming method thereof

Abstract

The invention relates to the technical field of MOEMS light modulators, in particular to a phase modulation type micromirror array programmable fresnel zone plate and a zooming method thereof. The light phase modulating capability of the MOEMS phase modulation type micromirror and the two-dimensional space modulating capability of an array modulator are utilized, a switch of a special packet unit of MOEMS micromirror arrays is controlled through a program, an adjustable-parameter reflection type fresnel zone plate is generated, and the zooming function is realized. When serving as a zooming optical system, the obtained micromirror array programmable fresnel zone plate has the advantages of simple structure, small size, high repeatability and accuracy, wide frequency band, simple wring and drive, fine optical effect and small optical errors and can be widely applied to a microscope, digital camera, telescope and other precision optical imaging equipment.

Description

technical field [0001] The invention relates to the technical field of MOEMS optical modulators, more specifically, the invention relates to a MOEMS phase modulation micromirror array programmable Fresnel zone plate and a zooming method thereof. technical background [0002] The zoom optical system or zoom lens is widely used in precision optical imaging equipment such as microscopes, digital cameras, and telescopes, and is an important optical component. The traditional zoom optical system is usually divided into two categories, one is to switch lenses with different focal lengths, and the other is to adjust the position of the lens on the optical axis. Both of them require a large mechanical device to change the position. The shortcomings of poor accuracy, poor repeatability, limited zoom capability, large size, and inflexible operation. [0003] In recent years, with the development of diffractive optics, diffractive optics can not only increase the freedom of design in ...

AI Technical Summary

Problems solved by technology

[0006] The present invention is to provide a programmable Fresnel zone plate of a phase-modulated micromirror array and its zooming method. By programming the phase-modulated micromirror array to control the modulation of the micromirror unit, the micromirror array dynamically generates parameters adjustable. The phase-type Fresnel zone plate completes the focusing function, solves the shortcomings of the traditional zoom optical system such as poor precision, poor repeatability, limited zoom capability, and inflexible operation, and at the same time makes the zoom system simple in structure and small in size. , wide operating frequency band, and high utilization rate of light energy

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