A q-switching device for extreme ultraviolet laser
An extreme ultraviolet and laser technology, applied in the direction of lasers, laser components, phonon exciters, etc., can solve the problems of unable to return to the laser rod, etc., and achieve the effect of simple structure, long life and easy operation
Active Publication Date: 2018-05-15
HAIMEN BIWEI INTPROP SERVICE CO LTD
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Problems solved by technology
Once the piezoelectric converter does not apply a radio frequency signal, the piezoelectric converter immediately generates ultrasonic waves in the quartz body to change its refractive index, so that the light passing through the quartz crystal is refracted and deviates from the mirror, so that the light cannot return to the laser rod
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Embodiment 1
[0035] Such as figure 2 As shown, the Q-switched output that is applied to 800nm femtosecond laser driving argon to generate 19~31 orders (ie 26~42nm) high-order harmonics: 1 is an 800nm laser beam splitter, and the energy splitting ratio is about 1:1; 2 is the driving lens, the focal length is about 500mm; 3 is the Q-switched lens, the focal length is about 500mm; 4 is the first translation stage with a range of 50mm, 5 is the second translation stage with a range of 50mm, 4 is a manual translation stage, and 5 is Motorized translation stage; 6 is an ellipsometer, which is an 800nm 1 / 4 wave plate; 7 is an 800nm laser beam combiner; 8 is a gas box, with a length of 50mm, filled with argon gas; 9 is a 800nm first total mirror , 10 is 800nm second total mirror, 11 is 800nm third total mirror, 12 is 800nm fourth total mirror; 13 is 800nm driving light source; 14 is Q-switched beam; 15 is driving beam; 16 is 500nm thick Aluminum film; 17 is the final extreme ultr...
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The invention relates to a Q-switching device for an extreme ultraviolet laser and a method for using it, including a light source, a beam splitter is installed on one side of the light source, a first translation stage is installed on the side of the driving beam, and a driving lens is installed inside the first translation stage. The first total reflection mirror, the second total reflection mirror and the third total reflection mirror are installed on one side of a translation platform, and the beam combining sheet is installed under the third total reflection mirror; the second translation platform is installed on the side of the Q-modulated beam, and the second A Q-switching lens is installed inside the second translation stage, a fourth total reflection mirror is installed on one side of the second translation stage, an ellipsoid is installed on one side of the fourth total reflection mirror, and a gas box is installed on the other side of the beam combiner , There is an inert gas in the gas box, and the inside of the gas box also has a Q-switched focus and a driving focus. An aluminum film is installed on the outside of the gas box, and one side of the aluminum film is an extreme ultraviolet laser with an adjustable Q value. The invention has the advantages of simple structure, easy operation and strong applicability, not only provides a new method for Q-modulation of extreme ultraviolet laser output, but also promotes the in-depth development of related fields.
Description
Technical field [0001] The invention relates to a Q-switching device for extreme ultraviolet lasers and a method of use thereof. An external lens is used to realize the Q-switch function in the cavity and control the interaction of the working medium (inert gas) in the cavity with a driving light source to generate high-order harmonics, thereby obtaining The extreme ultraviolet laser with controllable Q value is suitable for the generation of extreme ultraviolet laser (high harmonic) and Q-switching. Background technique [0002] Extreme ultraviolet and even X-ray lasers are generally difficult to generate with traditional laser crystals, and because they are easily absorbed by the atmosphere, it is usually necessary to place the laser generating elements in a vacuum environment. Therefore, extreme ultraviolet and even X-ray lasers are generally produced in the form of high-order harmonics, that is, the interaction of strong-field visible lasers and inert gases to obtain high-fre...
Claims
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IPC IPC(8): H01S3/115
Inventor 尉鹏飞瞿子文沈诗婕郑文琪叶小倩康志栋赵钢赵飞洋赵哲韬张丽英杨丁中董一鸣
Owner HAIMEN BIWEI INTPROP SERVICE CO LTD