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Non-evapotranspire type low-temperature activated titanium-based getter alloy and preparation method thereof

A getter and non-evaporable technology, which is applied in the field of non-evaporable low-temperature activated titanium-based getter alloy and its preparation, to achieve the effects of improved getter performance, strong binding force, and fast speed

Active Publication Date: 2015-07-01
GRIMAT ENG INST CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In summary, the research and development of low-temperature activated getters has become a technical bottleneck in related fields

Method used

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  • Non-evapotranspire type low-temperature activated titanium-based getter alloy and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0021] Metal element materials were weighed according to the following mass percentages: titanium: 76%, cobalt: 18.5%, niobium: 5.5%, and unavoidable impurities accounted for 0.2% of the total.

[0022] Getter alloy manufacturing process: put the above-mentioned titanium and cobalt metal elements into the graphite crucible of the intermediate frequency vacuum melting furnace, when the vacuum degree is 1×10 -1 Pa, start heating and melting, and the melting temperature is 1750°C. When the material is completely melted into a liquid state, it is poured into the cooling mold, and taken out from the furnace body after being completely cooled, it is a titanium-cobalt getter alloy ingot. Then it is broken into granules smaller than 20mm square, put into the ball mill, under the state of protective gas, the ball is milled into powder, and filtered with a sieve to ensure that the diameter of the powder is 30 microns, and then mixed with niobium powder with a particle size of 35 microns...

Embodiment 2

[0025] Metal element materials are weighed according to the following mass percentages: titanium: 78%, cobalt: 18%, niobium: 4%, and unavoidable impurities account for 0.3% of the total;

[0026] Getter alloy manufacturing process: put the above-mentioned titanium and cobalt metal elements into the graphite crucible of the intermediate frequency vacuum melting furnace, when the vacuum degree is 1×10 -1 Pa, start heating and melting, the melting temperature is 1850°C. When the material is completely melted into a liquid state, it is poured into the cooling mold, and taken out from the furnace body after being completely cooled, it is a titanium-cobalt getter alloy ingot. Then crush it into granules smaller than 15mm square, put it into a ball mill, and in the state of protective gas, ball mill it into powder, filter it with a sieve to ensure that the diameter of the powder is 35 microns, and then mix it with niobium powder with a particle size of 30 microns according to the pro...

Embodiment 3

[0029] Metal element materials are weighed according to the following mass percentages: titanium: 77%, cobalt: 17.5%, niobium: 5.5%, and unavoidable impurities account for 0.1% of the total;

[0030] Getter alloy manufacturing process: put the above-mentioned titanium and cobalt metal elements into the graphite crucible of the intermediate frequency vacuum melting furnace, when the vacuum degree is 5×10 -2 Pa, start heating and melting, and the melting temperature is 1800°C. When the material is completely melted into a liquid state, it is poured into the cooling mold, and taken out from the furnace body after being completely cooled, it is a titanium-cobalt getter alloy ingot. Then crush it into granules smaller than 18mm square, put it into a ball mill, and in the state of protective gas, ball mill it into powder, filter it with a sieve to ensure that the diameter of the powder is 40 microns, and then mix it with niobium powder with a particle size of 45 microns according to...

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Abstract

The invention relates to a getter alloy, a non-evapotranspire type low-temperature activated titanium-based getter alloy and a preparation method thereof. The getter alloy comprises the following components in parts by mass: 72-80 parts of titanium, 10-20 parts of cobalt, 3-8 parts of niobium, and the balance of other impurity occupying 0-0.5% of the total mass of the alloy; besides the advantage of low-temperature activation, the hydrogen absorption capacity of the getter is greatly improved in comparison with the traditional low-temperature activated getter; the low activation temperature is guaranteed, and the high gas absorption performance is guaranteed.

Description

technical field [0001] The invention relates to a getter used in the vacuum field, in particular to a non-evaporable low-temperature activated titanium-based getter alloy and a preparation method thereof. Background technique [0002] Getters, also known as getters, are a general term for materials that are used to obtain, maintain vacuum and purify gases, etc., and can effectively absorb certain gas molecules. Non-evaporable getters are mainly divided into two categories: externally heated and internally heated. [0003] In optoelectronic products, thermal insulation equipment, and similar devices that require a vacuum state, in order to maintain long-term work stability and prolong the service life of the device, a certain degree of vacuum must be maintained in the device for a long time. However, as time goes by, the gas molecules remaining in the device inside the device will be slowly released from the device, and the gas molecules outside the device, especially the sm...

Claims

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Application Information

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IPC IPC(8): C22C14/00C22C1/02B22F9/04
Inventor 张心强朱君
Owner GRIMAT ENG INST CO LTD
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