Template-free method for preparing large-specific-surface-area copper particle/film composite material
A technology of large specific surface area and composite material, applied in the field of preparing large specific surface area copper particle film composite material without template, can solve the problems of difficult particle fixation, long experiment period, Cu particle pollution, etc., and achieves convenient operation, low cost, simple method effect
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Embodiment 1
[0026] The method for preparing the copper particle film composite material with large specific surface area without template comprises the following steps:
[0027] (1), glass substrate cleaning
[0028] Put the glass substrate into a beaker filled with absolute ethanol, place the beaker in an ultrasonic cleaner for ultrasonic cleaning for 10 minutes, and then put the cleaned glass in a beaker filled with deionized water for ultrasonic cleaning for 5 minutes. Dry the cleaned glass substrate with nitrogen, and then fix the glass substrate on the substrate stage of the magnetron sputtering coating machine;
[0029] (2), target preparation and coating machine substrate stage heating
[0030] A Cu target with a purity of 99.99at% and a Cr target with a purity of 99.99at% are respectively placed on the target position of the coating machine. After placing the target and the glass substrate, close the vacuum chamber of the coating machine, and turn on the mechanical pump and mole...
Embodiment 2
[0034] The method for preparing the copper particle film composite material with large specific surface area without template comprises the following steps:
[0035](1), glass substrate cleaning
[0036] Put the glass substrate into a beaker filled with absolute ethanol, put the beaker into an ultrasonic cleaner for ultrasonic cleaning for 10 minutes, and then put the cleaned glass into a beaker filled with deionized water for ultrasonic cleaning for 10 minutes. Dry the cleaned glass substrate with nitrogen, and then fix the glass substrate on the substrate stage of the magnetron sputtering coating machine;
[0037] (2), target preparation and coating machine substrate stage heating
[0038] A Cu target with a purity of 99.99at% and a Cr target with a purity of 99.99at% are respectively placed on the target position of the coating machine. After the target and glass substrate are placed, close the vacuum chamber of the coating machine, and turn on the mechanical pump and mol...
Embodiment 3
[0042] The method for preparing the copper particle film composite material with large specific surface area without template comprises the following steps:
[0043] (1), glass substrate cleaning
[0044] Put the glass substrate into a beaker filled with absolute ethanol, place the beaker in an ultrasonic cleaner for ultrasonic cleaning for 15 minutes, and then put the cleaned glass in a beaker filled with deionized water for ultrasonic cleaning for 15 minutes. Dry the cleaned glass substrate with nitrogen, and then fix the glass substrate on the substrate stage of the magnetron sputtering coating machine;
[0045] (2), target preparation and coating machine substrate stage heating
[0046] A Cu target with a purity of 99.99at% and a Cr target with a purity of 99.99at% are respectively placed on the target position of the coating machine. After placing the target and the glass substrate, close the vacuum chamber of the coating machine, and turn on the mechanical pump and mo...
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