Transparent conductive oxide film based on TiN interlayer doping

An oxide film, transparent conductive technology, applied in the direction of the conductive layer on the insulating carrier, can solve the problems of low conductivity, low light loss, low conductivity, etc., to increase the light absorption area, good conductivity, and improve device performance. Effect
CN104835554AActive Publication Date: 2015-08-12ZHEJIANG UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
ZHEJIANG UNIV
Publication Date
2015-08-12

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Abstract

The present invention discloses a transparent conductive oxide film based on TiN interlayer doping, comprising a substrate, wherein a lower transparent conducting layer, an interlayer and an upper transparent conducting layer successively grow on the substrate from the bottom up, the lower transparent conducting layer and the upper transparent conducting layer are transparent conductive oxide layers, and the interlayer is a TiN layer. According to the transparent conductive oxide film of the present invention, a TiN film (i.e., the interlayer) is doped in a traditional TCO film, in this way, carrier concentration of the film is increased, carrier mobility is raised, and optical performance of the film of changed, so that the film can be matched with medium within a near-infrared band to generate plasma resonance, therefore, the transparent conductive oxide film can be applied to the field of optical devices within the near-infrared band, in addition, TiN is rich in source and low in price, thereby facilitating commercial promotion and application.
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Description

technical field

[0001] The invention relates to the technical field of photoelectric materials, in particular to a transparent conductive oxide film based on TiN interlayer doping. Background technique

[0002] With the development of social science, the demand for functional materials is increasingly urgent. New functional materials have become the key to the development of new technologies and industries. In recent years, surface plasmon technology has received more and more attention. Noble metal materials such as gold and silver have been widely used in optoelectronic material devices such as surface plasmons because of their low ohmic loss and high electrical conductivity.

[0003] However, precious metal materials such as gold and silver still have certain limitations. Compared with electrical properties, their optical properties are poor, especially in the near-infrared band (wavelength range between 1 μm and 3 μm), and the optical loss is very high. , the optical p...

Claims

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