Device and method for recycling and extracting high-purity SF6 gas by employing membrane separation method
A membrane separation method and recovery device technology, which is applied in the direction of sulfur and halogen compounds, can solve the problems of complex devices and methods, and achieve the effects of simple operation, strong controllability, and reduced irreversible impact
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Example Embodiment
[0040] Example 1
[0041] A method for recovering and extracting high-purity SF by membrane separation 6 The gas device includes a compressor 1 and a membrane separation and recovery device connected behind the compressor 1; the membrane separation and recovery device is composed of N hollow fiber membranes 2 connected in sequence, and the N≥4.
[0042] In this embodiment, the number N of the hollow fiber membranes 2 is preferably set to four levels, which are named first-level hollow fiber membranes, second-level hollow fiber membranes, third-level hollow fiber membranes, and fourth-level hollow fiber membranes in sequence along the gas flow direction. ,Such as figure 1 Shown. At the same time, in the present invention, the first-level hollow fiber membrane, the second-level hollow fiber membrane, the third-level hollow fiber membrane, and the fourth-level hollow fiber membrane can be selected according to different amounts of recovered gas.
[0043] In this embodiment, the above d...
Example Embodiment
[0048] Example 2
[0049] The difference between this embodiment and embodiment 1 is that: in the device of the present invention, each hollow fiber membrane 2 has a permeate side exhaust port; in the membrane separation and recovery device, the hollow fiber The permeate side exhaust port of the membrane 2 is connected to the atmosphere, and the permeate side exhaust ports of the remaining hollow fiber membranes 2 are connected to the intake port of the compressor 1, such as figure 2 Shown.
[0050] In this embodiment, the device of this embodiment is used to 6 The method of gas purification is as follows:
[0051] (1) SF 6 After the recovered gas with a content of 2.2% is pressurized by the compressor, a mixed gas with a pressure of 0.7 MPaG is obtained, and the mixed gas is passed into the first-stage hollow fiber membrane; part of the gas separated by the first-stage hollow fiber membrane is SF 6 The content is less than 0.1%, so it meets the gas emission standards and can be dir...
Example Embodiment
[0059] Example 3
[0060] The difference between this embodiment and Embodiment 2 is that a gas pretreatment purification system is added in this embodiment, and the specific setting method is as follows:
[0061] A gas pretreatment purification system 3 is also provided between the compressor 1 and the membrane separation recovery device. The gas pretreatment and purification system 3 includes a compressed gas buffer tank, a precision filter, an ultra-precision filter, an activated carbon filter, and a dust filter that are sequentially connected along the gas flow direction, such as image 3 Shown.
[0062] Further, in order to facilitate control, the back end of the membrane separation recovery device is also connected with SF 6 For the finished gas buffer tank, the back end of the membrane separation and recovery device is also provided with a flow meter and a valve for adjusting the gas flow.
[0063] In this embodiment, the device of this embodiment is used to 6 The method of ga...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap