Mask plate, manufacturing method thereof, display panel and display device

Abstract

The invention discloses a mask plate, a manufacturing method thereof, a display panel and a display device. According to the mask plate, the manufacturing method thereof, the display panel and the display device, a traditional mask plate is improved, particularly, a notch is formed at the positions where at least part of the side cut surface of each opening of the mask plate intersects with the surface of one side close to a substrate during evaporation, the notches are formed through the chemical etching method or the laser cutting method, the area of the side, close to the substrate, of an opening is made to be larger than the area of the side, away from the substrate, of the opening during evaporation, in this way, the area of the marginal area of an evaporated film on the substrate is increased, the flatness of the marginal area is improved, the possibility that the metal film formed in the later stage breaks due to the fact that a step is too high is avoided, and the yield of products is increased.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a mask plate and a preparation method thereof, a display panel, and a display device. Background technique [0002] In the prior art, when manufacturing an OLED display panel, vacuum evaporation is generally used to evaporate organic materials or metal materials on a substrate to form a required film layer. Specifically, using a mask plate with a plurality of openings 11 as shown in FIG. The metal material is evaporated onto the substrate through the opening to form a corresponding film layer. [0003] As shown in Figure 1(b), it is a cross-sectional structure diagram of any opening 11 in the existing mask plate and the shading plate 12 nearby, the opening 11 is surrounded by the shading plate cut surface 14, and The cross-section of the baffle plate 12 is in a figure-eight shape. During the actual evaporation deposition process, the organic material or metal material evaporat...

AI Technical Summary

Problems solved by technology

[0004] Embodiments of the present invention provide a mask and its preparation method, a display panel, and a display device, which are used to solve the problem in the prior art that the slope of the edge region of the film layer formed by evaporation using the existing mask is relatively large. As a result, the metal film layer formed subsequently is prone to breakage, which in turn leads to the problem of short circuit of the device.

Images