A material partial pressure outgassing rate testing system and method

Abstract

The invention discloses a material partial pressure deflation rate testing device and method. The device comprises a measuring chamber, a vacuum pump group and a flow-limiting small hole; the vacuum pump group is connected with the measuring chamber through a plug valve, and the flow-limiting small hole The front end is connected to the measurement chamber through an angle valve, and the rear end is directly connected to the vacuum pump group; through the quadrupole mass spectrometer and separation gauge, respectively measure the background partial pressure and background nitrogen equivalent of different gases when the measurement chamber is empty and contains samples The total pressure, and then obtain the partial pressure outgassing rate of the nitrogen equivalent of the sample. The invention only needs a quadrupole mass spectrometer to complete the real-time and continuous measurement of the partial pressure degassing rate of the material, and reduces the secondary adsorption of the gas caused by the pressure rise in the measurement chamber caused by the degassing of the vacuum material during the measurement process Opportunities, and can facilitate the horizontal comparison of gases with different components.

Description

technical field [0001] The invention belongs to the technical field of vacuum measurement, and in particular relates to a material partial pressure outgassing rate testing system and method. Background technique [0002] Materials placed in a vacuum environment can produce the following three forms of outgassing: [0003] 1) Desorption of gas adsorbed on the surface of the material in the atmospheric environment; [0004] 2) The gas dissolved in the material is released by diffusion; [0005] 3) Evaporation and decomposition of the material itself. [0006] Vacuum environments are increasingly used in modern scientific research and industrial production, such as spacecraft ground tests, vacuum coating, semiconductor processing, etc. Therefore, research work related to outgassing of vacuum materials has been carried out at home and abroad. With the gradual improvement of experimental and production environment requirements, the outgassing rate test of vacuum materials not...

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Problems solved by technology

[0011] 1. When using the pressure rise method to measure the partial pressure of the outgassing rate of the vacuum material, as the test time increases, the pressure in the vacuum chamber will easily cause secondary adsorption of the gas, which will affect the accuracy of the measurement results;

[0012] 2. The sensitivity of the ionization vacuum gauge and the quadrupole mass spectrometer for high vacuum measurement are closely related to the gas ionization probability. However, at present, the correction factor of the ionization vacuum gauge and the sensitivity of the quadrupole mass spectrometer are actually the sensitivity of the measuring equipment to nitrogen or argon. Correction factor or sensitivity, the ionization probability of different gases is not the same, ignoring the difference in the sensitivity of the measuring equipment to different gases will inevitably lead to inaccurate measurement results, and the partial pressure and gas release rates of different gas release components are not comparable;

[0013] 3. The test process of the existing vacuum material partial pressure degassing rate test device is relatively complicated, and it is necessary to switch valves repeatedly or use two quadrupole mass spectrometers to complete the measurement, which is not conducive to the rapid and real-time partial pressure degassing rate test in the industry.

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