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Airtight packaging method of non-refrigeration infrared focal plane detector

A focal plane detector and uncooled infrared technology, which is applied in radiation control devices and other directions, can solve the problem that the price of uncooled infrared detectors cannot be accepted by the market, and achieve the goals of improving reliability, reducing costs, and reducing manufacturing costs Effect

Active Publication Date: 2015-11-18
KUNMING INST OF PHYSICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Because the uncooled infrared detector does not need to use the bulky refrigerator of the cooled detector and the dewar device for maintaining the vacuum, the overall complexity, power consumption, volume and weight of the detector are greatly reduced, but the current uncooled infrared detector The price still cannot be accepted by the market

Method used

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  • Airtight packaging method of non-refrigeration infrared focal plane detector
  • Airtight packaging method of non-refrigeration infrared focal plane detector
  • Airtight packaging method of non-refrigeration infrared focal plane detector

Examples

Experimental program
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Effect test

Embodiment 1

[0024] In the non-made infrared cold infrared focal plane detector prepared in this example, the photoelectric sensor 5 is made of barium strontium titanate (BST) ceramic material, and is connected by the common electrode 9; the readout circuit 6 is matched with the photoelectric sensor 5, and the tube The shell 7 is a conventional ceramic shell, and the window 8 is made of germanium.

[0025] The airtight packaging method of the uncooled infrared focal plane detector goes through the following steps:

[0026] In the first step, the readout circuit 6 and the photoelectric sensor 5 are flip-chip interconnected and packed together into the package 7; the surface of the window 8 for bonding with the package 7 is coated with epoxy resin;

[0027] In the second step, the shell 7 and the window 8 coated with epoxy resin are placed in the conventional glove box 11, and the glove box 11 is connected with the vacuum pump pipeline 12 connected with the vacuum pump. Vacuumize to 100mTor...

Embodiment 2

[0031] The airtight packaging method of the uncooled infrared focal plane detector goes through the following steps:

[0032] In the first step, the readout circuit 6 and the photoelectric sensor 5 are flip-chip interconnected and packed into the casing 7 together; the surface of the window 8 for bonding with the casing 7 is coated with silica gel;

[0033] In the second step, the shell 7 and the window plate 8 coated with silica gel are placed in the conventional glove box 11, and the glove box 11 is evacuated by the vacuum pump pipeline 12 connected with the vacuum pump. to 90mTorr, and then filled with dry argon through the inert gas pipeline 13, repeated vacuuming and filling with dry argon three times, until the environment in the glove box 11 was replaced with argon-based environment;

[0034] The third step is to heat the readout circuit 6, the photoelectric sensor 5, the shell 7 and the window 8 at 50° C. for 30 minutes in an argon-based environment to remove the reado...

Embodiment 3

[0037] The airtight packaging method of the uncooled infrared focal plane detector goes through the following steps:

[0038] In the first step, the readout circuit 6 and the photoelectric sensor 5 are flip-chip interconnected and packed together into the casing 7; the surface of the window 8 for bonding with the casing 7 is coated with instant adhesive;

[0039] In the second step, the shell 7 and the window 8 coated with instant adhesive are placed in the conventional glove box 11, and the glove box 11 is connected with the vacuum pump pipeline 12 connected with the vacuum pump. Vacuumize to 110mTorr, then fill dry xenon gas through the inert gas pipeline 13, repeat vacuuming and filling dry xenon gas three times, until the environment in the glove box 11 is replaced by xenon-based environment;

[0040] The third step is to heat the readout circuit 6, photoelectric sensor 5, tube shell 7 and window 8 at 100°C for 30 minutes in an environment dominated by xenon to remove the ...

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Abstract

The invention provides an airtight packaging method of a non-refrigeration infrared focal plane detector. The method comprises that a playback circuit and a photoelectric sensor are connected reversely and then mounted in a shell, and the surface, which is bonded to the shell, of a window slice is coated with an organic adhesive; the shell provided with the playback circuit and the photoelectric sensor and the window slice coated with the organic adhesive are placed in an inert gas dominant environment; the playback circuit, the photoelectric sensor, the shell and the window slice are heated to remove moisture thereon; and the window slice is bonded to the shell to ensure that an enclosed cavity of the shell includes inert gas internally, and the organic adhesive is removed after being solidified, and airtight packaging is realized. Thus, the manufacture cost of the non-refrigeration infrared focal plane detector is greatly reduced, airtight packaging of the non-refrigeration infrared focal plane detector can be realized needless of vacuum degree, and on the premise that the performance of the detector is ensured, the packaging cost is greatly reduced.

Description

technical field [0001] The invention relates to an airtight packaging method for an uncooled infrared focal plane detector, belonging to the technical field of infrared imaging systems. Background technique [0002] The infrared focal plane detector component is an important optoelectronic device to obtain the infrared thermal radiation information of the target scene. According to the working temperature of the detector, the devices can be divided into two categories: the refrigerated type whose temperature of the sensitive element of the detector is at or below -100°C during operation; the non-refrigerated type whose temperature of the sensitive element of the detector is around room temperature during operation. The principle of uncooled infrared focal plane detectors (eg figure 1 ) is to convert the infrared radiation 1 of the invisible scene to the human eye, after passing through the lens 2 and reaching the infrared focal plane detector 3, it is converted into electri...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L27/146
Inventor 胡旭杨春丽姬荣斌韩福忠董黎李冉王微李颜
Owner KUNMING INST OF PHYSICS
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