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Miniature fiber high temperature sensor based on Michelson interference theory and production method

A high-temperature sensor and optical fiber technology, which is applied to thermometers, instruments, thermometers, etc. that change physically/chemically, can solve the problems of measurement accuracy and repeatability affected by mechanical moving parts, and achieve great cost advantages, reliable performance, and simple structure Effect

Active Publication Date: 2015-12-02
TIANJIN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In this method, in order to achieve the optical path matching of the two optical fibers, it is usually necessary to use mechanical moving parts, so the measurement accuracy and repeatability are often affected by the mechanical moving parts, and it is only suitable for occasions with low measurement accuracy and stability requirements

Method used

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  • Miniature fiber high temperature sensor based on Michelson interference theory and production method
  • Miniature fiber high temperature sensor based on Michelson interference theory and production method
  • Miniature fiber high temperature sensor based on Michelson interference theory and production method

Examples

Experimental program
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Effect test

Embodiment 1

[0026] Embodiment 1: Based on the structure and manufacture of a miniature all-fiber Michelson temperature sensor.

[0027] Such as figure 1 As shown, the sensor splits the fiber core 3 into two parts by grinding the end face of the optical fiber 1. The first part of the fiber core is ground flat to form a reflection surface 5, and the second part of the fiber core is ground to a 45° angle to form a reflection surface 6. The fiber wall reflects surface 4, thereby forming a miniature Michelson interferometer. The production process is: first as figure 2As shown, fix the fiber ferrule 10 to the card slot, adjust the grinding angle to 45°; first paste 9 μm optical fiber polishing paper 12 on the turntable 11, set the rotation speed of the turntable 11 to 150 rpm, and polish the fiber ferrule for 10 to 30 minutes; then Replace the 3 μm optical fiber grinding paper 13 and the 1 μm optical fiber grinding paper 14 and grind for 10 minutes each. The rotation speed of the turntable ...

Embodiment 2

[0028] Embodiment 2: Measuring principle based on miniature all-fiber Michelson temperature sensor

[0029] Such as figure 1 As shown, by grinding the end face of the optical fiber, the optical fiber core layer 3 is split into two parts, the first part of the core is ground flat to form a plane reflective surface 5, and the beam is vertically reflected to form a reference beam 8 with a light intensity of 1 1 The second part of the fiber core is ground into a 45 ° angle to form a 45 ° angle reflection surface 6, and the light beam is totally reflected on this reflection surface, and the reflected light is vertically incident on the outer wall of the optical fiber. Incident to the reflective surface 6, part of the light is fully reflected again and coupled back to the fiber core 3 to form a sensing beam 9 with a light intensity of 1 2 When the reference beam 8 and the sensing beam 9 meet, two-beam interference will occur, and the interference light intensity can be expressed as...

example example 3

[0036] Example 3: Experimental system and demodulation based on miniature all-fiber Michelson temperature sensor

[0037] An experimental system based on a miniature all-fiber Michelson temperature sensor such as Figure 7 As shown, the light emitted by the broadband light source (SLD) 17 is incident on the miniature optical fiber Michelson sensor 20 through the circulator 18 , and the reflected light signal is incident on the spectrometer 19 through the circulator 18 again. Such as Figure 8 Shown is the Michelson interference fringes 22 received by the spectrometer. The sensor 20 is placed in the high temperature furnace 21, and the high temperature furnace 21 is used to provide temperature changes, starting from a normal temperature of 25°C, the temperature gradually increases to 950°C, and the temperature gradient is about 50°C. Figure 9 It shows that the peak value of the interference spectrum of the sensor drifts uniformly as the temperature changes from room temperat...

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Abstract

The present invention discloses a miniature fiber high temperature sensor based on the Michelson interference theory and a production method. The sensor is formed by a fiber (1). The core of the fiber is split into two parts, one part is provided with a planar reflecting surface (5) at an end part, and the other part is provided with a 45-degree reflecting surface (6) at the end part. When one light beam is emitted to the end face along the fiber core (3), the light beam is split into two beams, wherein one beam is reflected by the planar reflecting surface (5) to form reflection, one interferometer arm of a Michelson interferometer is formed, the other beam is fully reflected by the 45-degree reflecting surface (6) and then is reflected by a fiber wall reflecting surface (4) again, the other beam is coupled back to the fiber core (3), and the other interferometer arm of the Michelson interferometer is formed. The two beams meet at the fiber core to form Michelson interference fringe. Compared with the traditional Fabry-Perot or mach-zehnder temperature sensing, the miniature fiber high temperature sensor and the production method have the advantages of theoretical innovation, simple structure, reliable performance, and low production cost.

Description

technical field [0001] The invention relates to the field of optical fiber sensing, in particular to an all-fiber temperature sensor based on miniature Michelson interference theory and a manufacturing method. Background technique [0002] All-fiber sensors usually design microstructures directly on the fiber to achieve sensing. The sensor has the advantage of miniaturization and is widely used in the measurement of physical quantities such as temperature, pressure, strain and refractive index. Among them, in terms of temperature sensors, the all-fiber sensor has a higher temperature response dynamic range due to its single composition material, no thermal expansion coefficient mismatch problem, and thus overcomes the gap between different materials in general non-all-fiber sensors (such as MEMS sensors). The defect of limiting the temperature measurement range due to the mismatch of thermal expansion coefficients between them has attracted the attention of many researchers...

Claims

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Application Information

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IPC IPC(8): G01K11/32
Inventor 江俊峰刘铁根吴凡刘琨王双尹金德邹盛亮
Owner TIANJIN UNIV
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