Preparation method of textured ferroelectric thin film

Abstract

The invention discloses a preparation method of a ferroelectric film with a texture. The key point of the preparation method lies in that: firstly, a magnetic nanometer chain is prepared on a film forming carrier, and then the ferroelectric film is grown on the magnetic nanometer chain. The preparation method has the following benefits: the length, thickness and orientation of the magnetic nanometer chain can be adjusted and controlled through changing the size, direction and gradient of a magnetic field, so that the texture and purity of a ferrite film are controlled; the preparation method is simple and good in effect.

Description

technical field [0001] The invention belongs to the technical field of semiconductor materials, and in particular relates to a preparation method of a textured ferroelectric thin film. Background technique [0002] The energy crisis is currently a major problem facing countries all over the world. The development of renewable energy is an effective way to alleviate this problem. Among many renewable energy sources, solar energy is favored because of its rich resources, wide distribution, and cleanliness. Photovoltaic Power generation is a main form of solar energy development. Its principle is to use the photovoltaic effect to make photovoltaic cells to convert the sun's light energy into electrical energy. Photovoltaic cells are mainly divided into silicon, copper indium selenide, gallium arsenide, and cadmium telluride. As well as polymer photovoltaic cells, etc., the existing industrially produced thin-film solar cells have shortcomings such as low conversion efficiency, ...

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Problems solved by technology

[0002] The energy crisis is currently a major problem facing countries all over the world. The development of renewable energy is an effective way to alleviate this problem. Among many renewable energy sources, solar energy is favored because of its rich resources, wide distribution, and cleanliness. Photovoltaic Power generation is a main form of solar energy development. Its principle is to use the photovoltaic effect to make photovoltaic cells to convert the sun's light energy into electrical energy. Photovoltaic cells are mainly divided into silicon, copper indium selenide, gallium arsenide, and cadmium telluride. As well as polymer photovoltaic cells, etc., the existing industrially produced thin-film solar cells have shortcomings such as low conversion efficiency, poor stability, and relatively high production costs. To change the above shortcomings, you can improve the preparation process and technical parameters of the film, or increase the light intensity Utilization efficiency, the first method faces problems such as long research and development cycle, high cost, and technical difficulties. Therefore, it is very necessary to improve the utilization efficiency of light. , and increasing the thickness of the film can achieve this, but the thicker the film, it will inevitably reduce the stability of the solar cell, and at the same time increase the recombination rate of photogenerated carriers, reduce the conversion efficiency, and prepare high-quality, specific Texture, lower defects, and higher purity (high main phase ratio) films are effective means to solve this problem. Textured films can enhance the absorption of light without affecting the photogenerated carriers. Therefore, it is very necessary to prepare a solar cell film with a specific texture and high purity.

[0003] At present, the methods of preparing thin films mainly include sol-gel method (Sol-Gel), chemical solution deposition (CSD), chemical vapor deposition (CVD), pulsed laser deposition (PLD), molecular beam epitaxy (MBE) and magnetic Regardless of the method, the Magnetron Sputtering method is to prepare a film first, and then sinter or anneal the film. However, it is difficult to obtain a film with a specific texture in these methods.

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