High-precision portable optical surface three-dimensional topography online detector

Abstract

The invention discloses a high-precision portable optical surface three-dimensional morphology online detector. The detector is mainly composed of a light source, a monocular interference microscope, an image acquisition system, a control source, a driving source, a phase shifter and an industrial control computer. The high-precision portable optical surface three-dimensional morphology online detector has the advantages of small volume and good vibration resistance performance, can meet the requirement of ultra-precision processing elements in the fields of optics, microelectronics, machinery and the like for high-precision online rapid batch detection, can be applied to such production and scientific research fields as chips, LEDs, micromechanics, micro-optics, optical gyros for aerospace, strong lasers, astronomical telescopes and the like.

Description

technical field [0001] The invention relates to the field of optical interference measurement, in particular to a device for rapid and high-precision on-line batch detection of ultra-precision processing components in the fields of optics, microelectronics, machinery and the like. Background technique [0002] The surface topography of optical components, even if there is only a small unevenness, will cause light scattering and degrade the performance of the optical system, thereby affecting the performance of the entire system. Therefore, accurate measurement and evaluation of surface topography can correctly identify changes and defects in the processing process, and it is also important for controlling and improving processing methods, studying the relationship between performance and surface geometry, and improving product performance and the quality of processed surfaces. are of great significance. [0003] Existing optical surface topography detectors are mainly produ...

AI Technical Summary

Problems solved by technology

This structure has insufficient stability and is greatly affected by vibration and airflow, requiring anti-vibration platforms or other complex anti-vibration measures

At the same time, general-purpose shape detectors generally adopt a vertical structure, and the tested part is placed between the measuring table and the objective lens, which limits the lateral size of the tested part and makes it impossible to realize the measurement of the surface of the large-diameter optical element. detection

Moreover, affected by the thickness of the sample to be tested and the installation position, each test requires a long time to re-adjust, so the general-purpose shape detector is only suitable for laboratory testing, which limits the online testing of the instrument during production and processing

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