Hexagon Talbot array illuminator and manufacturing method thereof
An illuminator, hexagonal technology, applied in the direction of instruments, optics, optical components, etc., can solve the problems of limited multiple phase orders, reduced diffraction efficiency, complex processing process, etc., to achieve easy processing and replication, high strength The effect of uniform distribution and simple device structure
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Embodiment 1
[0045] Such as figure 1 As shown, a preparation method of a hexagonal Taber array illuminator specifically includes the following steps:
[0046] Step 1: Set the number values M and N of the hexagonal array light spots in two directions, correspondingly set M×N regular hexagonal primitives of the same size, and the vertical distance △ and spot compression ratio γ of each primitive;
[0047] Step 2: Calculate the phase value of each primitive at the corresponding position through the number values M and N of the hexagonal array spot in two directions, as well as the vertical distance △ of the primitive and the spot compression ratio γ
[0048] Step 3: According to the phase value of each primitive Calculate the relative displacement value δ between the center of the second light hole in each primitive and the center of the first light hole of the primitive mn , and then determine the geometric structure of each primitive;
[0049] Step 4: According to the geometric st...
Embodiment 2
[0076] The basic idea of the present invention is: first, the pure phase distribution formula [J.Opt.Soc.Am.A25,203(2008)] of the hexagonal Taber array illuminator given based on the theoretical analysis of fractional Taber effect, obtains The phase distribution of the fractional Taber array with high compression ratio of any order; then, according to the circuitous phase encoding principle [Appl. Elementary processing: Divide the whole hexagonal Taber array illuminator into closely arranged regular hexagonal sampling units, put a small regular hexagonal light hole into each sampling unit, and change the small regular hexagonal light The position between the center of the aperture and the sampling center is used to encode the phase; finally, the multi-order phase distribution of each element in the hexagonal Talbot array illuminator is encoded into a binary (0, π) distribution, so that the multiple The order Talbot array illuminator is transformed into a binary array illumin...
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