Surface acoustic wave resonator type vibration sensor and surface acoustic wave resonator type vibration detection system

A vibration sensor, surface acoustic wave technology, applied in the measurement of ultrasonic/sonic/infrasonic waves, instruments, measuring devices, etc., can solve the problem of large occupied volume of the surface acoustic wave sensor, and achieve small occupied space, cost saving, and simple circuit structure. Effect

Active Publication Date: 2016-02-10
MESNAC
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] In order to solve the technical problem that the existing surface acoustic wave sensor occupies a large volume, the present invention provides a surface acoustic wave resonator type vibration sensor

Method used

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  • Surface acoustic wave resonator type vibration sensor and surface acoustic wave resonator type vibration detection system
  • Surface acoustic wave resonator type vibration sensor and surface acoustic wave resonator type vibration detection system
  • Surface acoustic wave resonator type vibration sensor and surface acoustic wave resonator type vibration detection system

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Embodiment 1

[0032] Embodiment one, see figure 2 As shown, the present embodiment provides a surface acoustic wave resonator type vibration sensor, including a first antenna 101, a matching network 102, a reflection grid 103, and an interdigital transducer 104, at least the reflection grid 103, and an interdigital transducer The energy device 104 is arranged on the piezoelectric substrate 105, see image 3 As shown, the matching network 102 includes an optimal matching network composed of at least one capacitor and at least one inductor. The optimal matching network is also connected in parallel with an acceleration detection circuit. The acceleration detection circuit includes several branches connected in parallel. The number of branches incorporated into the optimal matching network is different. The working principle of the surface acoustic wave resonator type vibration sensor of the present embodiment is: the first antenna 101 receives the excitation signal, by adding an acceleratio...

Embodiment 2

[0034] Embodiment 2, this embodiment provides a schematic circuit diagram of a surface acoustic wave resonator type vibration sensor, see image 3 As shown, the optimal matching network is composed of the first capacitor C0 and the first inductor L0 connected in parallel, and the acceleration detection circuit is connected in parallel at both ends of the parallel circuit composed of the optimal matching network.

[0035] As a preferred embodiment, each branch of the acceleration detection circuit is provided with an elastic switch element. see Figure 4 As shown, the elastic switch element is a spring or a reed, and when the acceleration in the deformation direction of the spring or the reed reaches a threshold value, the spring or the reed deforms and conducts the branch where it is located. Of course, the acceleration threshold at which the spring or reed can make the branch where it is connected is fixed, and the thresholds of the elastic switching elements on each branch ...

Embodiment 3

[0037] Embodiment three, this embodiment provides a schematic circuit diagram of a surface acoustic wave resonator type vibration sensor, see Figure 5 As shown, the optimal matching network is composed of a first capacitor C1 and a first inductor L1 connected in parallel, and the acceleration detection circuit is connected in parallel at both ends of the first inductor L1.

[0038] In this embodiment, the acceleration detection circuit includes several parallel branches, wherein the first branch from left to right is connected in series by an elastic switching element K1 and a capacitor C2, and the second branch is connected by an elastic switching element K2 It is connected in series with an inductor L2, and the third branch is connected in series with a capacitor C3 and an inductor L3 by an elastic switching element K3. In this embodiment, the springs in the passive acceleration sensor are selected as the elastic switch elements K1-K3. The elastic switch elements K1-K3 are...

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Abstract

The present invention discloses a surface acoustic wave resonator type vibration sensor and a surface acoustic wave resonator type vibration detection system. The surface acoustic wave resonator type vibration sensor comprises a first antenna, a matching network, a reflecting grating and an interdigital transducer. The reflecting grating and the interdigital transducer are arranged on a piezoelectric substrate; the matching network includes an optimum matching network consisting of at least one capacitor and at least one inductor; and the optimum matching network is connected in parallel with an acceleration detection circuit, the acceleration detection circuit includes a plurality of branches which are in parallel connection, and the number of branches merged into the optimum matching network is different at different accelerated speeds. Through arrangement of an acceleration detection circuit in a matching circuit, the surface acoustic wave resonator type vibration sensor provided by the invention is simple in circuit structure and small in space usage, and does not have to increase the area of a piezoelectric substrate so that the cost may be saved.

Description

technical field [0001] The present invention relates to a surface acoustic wave sensor, in particular to a surface acoustic wave resonator type vibration sensor. Background technique [0002] Surface acoustic wave (SAW) sensors can be divided into resonator type and delay line type according to the function of the chip device. The single-port surface acoustic wave resonator is one of the types of surface acoustic wave sensors, including a central interdigital transducer (IDT) and reflective grids on both sides of the symmetrically distributed interdigital transducer, and the central interdigital transducer The reflective grids on both sides of the distribution and distribution are used to form an acoustic resonant cavity, and the interdigital transducers are used for mutual conversion between sound and electricity. [0003] Surface Acoustic Wave Radio Frequency Identification (RFID, Radio Frequency Identification) technology is a technology that applies non-contact tags, wh...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01H11/08G01P15/08
CPCG01H11/08
Inventor 董兰飞滕学志陈海军韦江波孙培峰
Owner MESNAC
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