Ni-W-added Al alloy target material and manufacturing method thereof

A manufacturing method and alloy target technology, which are applied in metal material coating process, ion implantation plating, coating and other directions, can solve the problems of uneven structure and micro-segregation of materials, and achieve precise composition control, uniform composition distribution, The effect of high purity of the finished product

Active Publication Date: 2016-03-23
ADVANCED TECHNOLOGY & MATERIALS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although the method is simple and easy to implement, the prepared material has the defects of microsegregation and uneven structure.
[0005] At present, there is no report on the Ni-W alloy target material with Al added. Adding a small amount of Al to the Ni-W alloy can improve the corrosion resistance of the Ni-W alloy film and prolong the corrosion resistance time of the alloy film.

Method used

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  • Ni-W-added Al alloy target material and manufacturing method thereof
  • Ni-W-added Al alloy target material and manufacturing method thereof
  • Ni-W-added Al alloy target material and manufacturing method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0046] The Ni-W-Al alloy disk prepared in this embodiment is composed of the following elements in atomic percent: Ni: 89.5%, W: 10%, Al: 0.5%.

[0047] The specification of the alloy disk prepared in this embodiment is Φ170×6.35 mm.

[0048] The manufacturing method is as follows:

[0049] (1) Ingredients: According to the design requirements of the above alloy target composition, weigh nickel blocks with a purity of 99.95%, high-purity aluminum blocks with a purity of 99.95%, and high-purity tungsten rods with a purity of 99.95%;

[0050] (2) Master alloy smelting: put the weighed nickel and tungsten metal blocks into a vacuum induction melting furnace, and smelt them according to the normal smelting process (i.e., smelting according to the process well known in the art), wherein the vacuum degree is controlled at 0.1 during smelting Below Pa, the smelting temperature is controlled at about 1690°C, and the refining time is 15 minutes. After the smelting is completed, the po...

Embodiment 2

[0060] The Ni-W-Al alloy disk prepared in this embodiment is composed of the following elements in atomic percent: Ni: 82%, W: 8%, Al: 10%.

[0061] The specification of the alloy disk prepared in this embodiment is Φ170×6.35 mm.

[0062] The manufacturing method is as follows:

[0063] (1) Ingredients: According to the design requirements of the above alloy target composition, weigh nickel blocks with a purity of 99.95%, high-purity aluminum blocks with a purity of 99.95%, and high-purity tungsten rods with a purity of 99.95%;

[0064] (2) Master alloy smelting: Put the weighed nickel and tungsten metal blocks into a vacuum induction melting furnace, and smelt them according to the normal smelting process (ie, smelting according to the well-known process in the art), wherein the vacuum degree is controlled at 0.085 during smelting Pa, the smelting temperature is controlled at about 1650°C, and the refining time is 15 minutes. After the smelting is completed, the power is tur...

Embodiment 3

[0073] The Ni-W-Al alloy disk prepared in this embodiment is composed of the following elements in atomic percentage: Ni: 93.5%, W: 3.5%, Al: 3%.

[0074] The specification of the alloy disk prepared in this embodiment is Φ170×6.35mm.

[0075] The manufacturing method is as follows: (1) Ingredients: according to the design requirements of the above-mentioned alloy target composition, weigh a nickel block with a purity of 99.95%, a high-purity aluminum block with a purity of 99.95%, and a high-purity tungsten rod with a purity of 99.95%;

[0076] (2) Master alloy smelting: put the weighed nickel and tungsten metal blocks into a vacuum induction melting furnace, and smelt them according to the normal smelting process (ie, smelting according to the well-known process in the art), wherein the vacuum degree is controlled at 0.08 during smelting Pa, the smelting temperature is controlled at about 1680°C, and the refining time is 10 minutes. After the smelting is completed, the power...

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Abstract

The invention discloses an Ni-W-added Al alloy target material and a manufacturing method thereof. The target material includes, by atom percentage, 0.5-10% of Al, 3.5-15% of W and 75-96% of Ni. The manufacturing method sequentially includes the steps of burdening, intermediate alloy smelting, secondary smelting, ingot casting, forging, primary heat treatment, rolling, secondary heat treatment and machining for finished product production. The Ni-W-added Al alloy target material has the advantages that the components of finished products are controlled accurately, uniform in distribution and free of segregation, no inclusion exists, grains are uniform, and the finished products are high in purity. Specifically, the components are controlled accurately to be smaller than or equal to 0.2 at%, the mean grain size is not larger than 80 micrometers, and the purity is up to 99.95%.

Description

technical field [0001] The invention belongs to the field of metal materials and metallurgical preparation, and in particular relates to an Al-added Ni-W alloy target and a manufacturing method thereof, which is especially suitable for magnetron sputtering. Background technique [0002] The world today has entered the information age. The explosive growth of information volume puts forward higher and higher requirements for information storage technology. The ever-increasing demand for high storage capacity, high data access speed, and high-performance-price ratio storage devices has further promoted the development of storage recording technology. In recent years, the performance of traditional storage and recording technologies has become higher and higher, and new storage and recording technologies have emerged continuously. Information storage has become one of the most active fields in current information technology. Among all information storage methods, magnetic sto...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/35C22C19/03
Inventor 张凤戈穆健刚李建奎周丽丽梁俊才周宁陈鹏刘健
Owner ADVANCED TECHNOLOGY & MATERIALS CO LTD
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