Movable silicon wafer annealing equipment
An annealing equipment and mobile technology, applied in the directions of crystal growth, post-processing details, and post-processing, etc., can solve the problems that cannot meet the process requirements, temperature uniformity and cleanliness are very high, and achieve improved consistency, reliability, and economy Significant benefits and large application space
Inactive Publication Date: 2016-05-04
SHAANXI SHENGMAI PETROLEUM
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Problems solved by technology
Since the processing of silicon wafers requires very high temperature uniformity and cleanliness of the external environment, ordinary annealing treatment or annealing treatment under atmosphere protection conditions can no longer meet the process requirements
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[0016] A kind of mobile silicon wafer annealing equipment, comprises support platform 7, on the support platform 7, through a main body moving structure 8, the box door connected in sequence, heating system 3, quartz tube 4, vacuum system 5 and inflation system are installed; In addition , An electric control part 1 is also provided on the supporting platform 7, and the electric control part 1 is connected with the heating system 3.
[0017] Wherein, the heating system 3 includes four parts such as thermal insulation material, heating body, cage and cage water cooling device. The thermal insulation material is mullite material with good thermal insulation performance. The heating body is Fe-Cr-Al wire material, which is evenly arranged along the circumference of the quartz tube 4. It is divided into three zones for heating, and each zone is controlled independently to ensure the temperature uniformity inside the vacuum chamber. The water cooling device of the cage can ensure t...
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The present invention relates to the technical field of semiconductor devices, particularly to movable silicon wafer annealing equipment, which comprises a support table frame, wherein a box door, a heating system, a quartz tube, a vacuum system and an inflation system are arranged on the support table frame through a main body movement structure and are sequentially connected, the support table frame is further provided with an electric control part, and the electronic control part is connected to the heating system. According to the present invention, the movable silicon wafer annealing equipment has characteristics of good temperature uniformity, good sealing property, more silicon wafer treatment number in one time, and zero silicon wafer pollution; with the movable silicon wafer annealing equipment, the difficult problems that the silicon wafer annealing treatment requirements are high and the general equipment ca not meet the requirements are met, the uniformity and the reliability of the silicon wafer finished product are improved, and the production efficiency is substantially improved; and the movable silicon wafer annealing equipment has broad application spaces in the fields of semiconductor device manufacturing and electronic device packaging, and has significant economic benefits.
Description
technical field [0001] The invention relates to the technical field of semiconductor devices, in particular to a mobile silicon wafer annealing device. Background technique [0002] Monocrystalline silicon is a single crystal of silicon. It is an important part of crystalline materials and is at the forefront of the development of new materials. Its main uses are as semiconductor materials and the use of solar photovoltaic power generation and heating. The development of high-tech value-added materials represented by monocrystalline silicon and related high-tech industries has become the pillar of the contemporary information technology industry, and has made the information industry the fastest growing leading industry in the global economic development. But there is no single silicon in nature, and it is mostly in the state of oxide or silicate. High-purity silicon is extracted from quartz. Taking monocrystalline silicon as an example, the extraction must go through the f...
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IPC IPC(8): C30B33/02C30B29/06
Inventor 王耀斌
Owner SHAANXI SHENGMAI PETROLEUM