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Optical Modulation Transfer Function Analysis Method for Absolute Distance Measurement

An optical modulation and transfer function technology, which is applied in the absolute distance measurement and high-precision field of millimeter-level measurement range, can solve the problem of low precision, and achieve the effect of large measurement range, short measurement time and high measurement accuracy

Active Publication Date: 2018-02-13
BEIJING INSTITUTE OF TECHNOLOGYGY
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

(See: Simar J F, Stockman Y, Surdej J. Single Wavelength Coarse Phasing In Segmented Telescopes [J]. Applied Optics, 2015, 54(5): 1118-1123.) This method has a large measurement range, but low precision, so only The rough measurement of the common phase error can be realized, and the precise measurement of the common phase error between each sub-mirror needs to use other detection methods

Method used

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  • Optical Modulation Transfer Function Analysis Method for Absolute Distance Measurement
  • Optical Modulation Transfer Function Analysis Method for Absolute Distance Measurement
  • Optical Modulation Transfer Function Analysis Method for Absolute Distance Measurement

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Embodiment 1

[0038] The method of the present invention is used to detect the common phase error of the segmented primary mirror telescope, and the principle of the optical path is as follows: figure 1 shown.

[0039] The initial common phase error of the segmented primary mirror telescope is on the order of submillimeters, where the common phase error corresponds to the axial distance between the measured mirror and the standard mirror. When working, the light source of the telescope is usually starlight, which can be regarded as parallel light. One of the sub-mirrors is used as a standard mirror. The plane wave is reflected by the standard mirror and the measured mirror. The reflected light wave carries the absolute difference between the two adjacent sub-mirrors. The distance ΔL is the information of the common phase error, and then reflected by the secondary mirror 1 of the telescope, the collimator lens 4 becomes two beams of parallel light waves, and the optical path difference OPD b...

Embodiment 2

[0048] The method of the present invention is used to detect the height of the block gauge, and the schematic diagram of the optical path is as follows figure 2 shown.

[0049] The principle of the method used to detect the height of the block gauge is basically the same as the principle of detecting the common phase error of the block mirror. The plane wave emitted by the white light collimator 1 is reflected by the beam splitter 4 to the measured mirror 3 and the standard mirror 2, and the height difference between the standard mirror and the measured mirror is ΔL. Accurately measure the absolute distance ΔL between the measured mirror and the standard mirror along the optical axis, and then the height of the measured block gauge can be obtained. Typically, ΔL should be less than a few millimeters. The plane wave is reflected by the standard mirror and the measured mirror, and is divided into two parallel plane waves, and the optical path difference OPD between them is tw...

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Abstract

The present invention relates to an optics modulation transfer function analysis method for absolute distance measurement, namely an absolute distance measurement method in a millimeter level, belonging to the field of the photoelectric technology. A discrete diaphragm opening is arranged at the exit pupil surface of a measurement optical path, reference light waves and measurement light waves are respectively collected, and the two light waves are subjected to interference diffraction through a focusing lens; a point diffusion function is obtained through the detection of focal plane light intensity distribution so as to obtain an optics modulation transfer function, and the function relation of the side peak value of the modulation transfer function and the absolute distance is obtained through adoption of a sectional-type quartic polynomial fitting. As regards different measured absolute distances, the high-precision measurement of an absolute distance may be realized through measurement of the side peak value of a modulation transfer function and adoption of calculation of a fitting function relation. The optics modulation transfer function analysis method for absolute distance measurement is fast in measurement speed, simple and clear in principle, large in measuring range and high in precision, is used for calibration of a high-precision block gauge, co-phasing detection of a large-scale blocking primary mirror telescope and the like.

Description

technical field [0001] The invention relates to an optical modulation transfer function analysis method for absolute distance measurement, which is an absolute distance measurement method with high precision and millimeter-level measurement range, and belongs to the technical field of photoelectric detection. technical background [0002] In astronomy, precision metrology, and military technology, it is often necessary to perform high-precision measurement of the height of a small step of a few nanometers to a few microns (that is, the absolute distance between the standard mirror and the measured mirror along the optical axis). For the high-precision measurement of the height of tiny steps, scholars at home and abroad have proposed many different measurement methods, which can be generally divided into two categories. [0003] The first type is the contact measurement method, also known as the direct measurement method, which can be realized by using a three-coordinate meas...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/06
CPCG01B11/0608
Inventor 赵伟瑞蒋俊伦
Owner BEIJING INSTITUTE OF TECHNOLOGYGY