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Corrosion-resistant and highly reflective front mirror with laminated structure and preparation method thereof

A laminated structure, corrosion-resistant technology, applied in optics, optical components, instruments, etc., can solve the problems of weakening reflected energy light absorption, easy to produce damage, weak scratch resistance of the dielectric layer, etc., to achieve clear development and reflection. The effect of high rate and simple preparation process

Active Publication Date: 2017-11-07
NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, there are the following technical deficiencies: 1. The light passes through the glass substrate twice, which weakens the reflected energy and must use particularly expensive glass to reduce the absorption of light; 2. The light reflected by the glass surface and the reflective layer will interfere with each other. Insufficient in development
Unfortunately, the dielectric layer has weak scratch resistance and is prone to damage. Once damaged, it will cause problems for the high-definition development of the reflective layer.
[0007] In summary, in the field of front mirror technology, there is still a lack of a new technology that is highly reflective, corrosion-resistant, scratch-resistant, and simple to prepare.

Method used

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  • Corrosion-resistant and highly reflective front mirror with laminated structure and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0046] as attached figure 1 As shown, a diffusion barrier layer 2 / reflective layer 3 / dielectric layer 4 / scratch-resistant layer 5 is sequentially deposited on a glass substrate 1 by physical vapor phase magnetron sputtering. First put the glass substrate 1 into acetone, absolute ethanol, and deionized water for 20 minutes, and then blow air for 2 hours in a drying oven at a temperature of 80 ° C; then fix it on a rotatable sample stage in a vacuum chamber , use the plasma generated by argon to etch it for 20min, when the vacuum degree of the chamber is less than 4.0×10 -5 Pa, rush into Ar gas and adjust sputtering pressure to 0.3Pa, adjust Ti 50 B 50 Target power density 8.5W / cm 2 , to deposit on the main surface of the glass substrate, the composition is Ti 50 B 50 Diffusion barrier layer 2 with a thickness of 100nm; then adjust the power density of the target Ag to 4.5W / cm 2 , deposit a layer of Ag reflective layer 3 on the diffusion barrier layer 2 with a thickness of...

Embodiment 2

[0048] as attached figure 1 As shown, a diffusion barrier layer 2 / reflective layer 3 / dielectric layer 4 / scratch-resistant layer 5 is sequentially deposited on a glass substrate 1 by physical vapor phase magnetron sputtering. First put the glass substrate 1 into acetone, absolute ethanol, and deionized water for 20 minutes, and then blow air for 2 hours in a drying oven at a temperature of 80 ° C; then fix it on a rotatable sample stage in a vacuum chamber , use the plasma generated by argon to etch it for 15min, when the vacuum degree of the chamber is less than 1×10 -5 Pa, rush into Ar gas and adjust sputtering pressure to 0.5Pa, adjust Ti 40 B 60 Target power density 12W / cm 2 , to deposit on the main surface of the glass substrate, the composition is Ti 40 B 60 Diffusion barrier layer 2 with a thickness of 80nm; then adjust the power density of the target Au to 5.5W / cm 2 , a layer of Au reflective layer 3 is deposited on the diffusion barrier layer 2 with a thickness o...

Embodiment 3

[0050] as attached figure 1 As shown, a diffusion barrier layer 2 / reflective layer 3 / dielectric layer 4 / scratch-resistant layer 5 is sequentially deposited on a glass substrate 1 by physical vapor phase magnetron sputtering. First put the glass substrate 1 into acetone, absolute ethanol, and deionized water for 15 minutes for ultrasonic cleaning, and then blow air for 2 hours in a drying oven at a temperature of 80°C; then fix it on a rotatable sample stage in a vacuum chamber , use the plasma generated by argon to etch it for 20min, when the vacuum degree of the chamber is less than 4.0×10 -5 Pa, rush into Ar gas and adjust sputtering pressure to 0.4Pa, adjust Ti 40 B 60 Target power density 14W / cm 2 , to deposit on the main surface of the glass substrate, the composition is Ti 40 B 60 Diffusion barrier layer 2 with a thickness of 30nm; then adjust the power density of the target Mo to 3.8W / cm 2 , deposit a layer of Mo reflective layer 3 on the diffusion barrier layer 2...

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Abstract

The invention discloses a corrosion resistant and highly reflective front surface mirror having a laminated structure. The front surface mirror comprises a glass matrix and the laminated structure arranged on the glass matrix, wherein the laminated structure comprises a diffusion impervious layer, a light reflecting layer, a dielectric layer and a scratch-resistant layer that are orderly deposited; the diffusion impervious layer made of Ti100-xBx and x is greater than 40 and less than 60; the light reflecting layer is made of at least one of Ag, Al, Mo, Au and Cr; the dielectric layer is a single-layer dielectric layer or a double-layer dielectric layer; the single-layer dielectric layer is one of an A12O3 layer, an SiO2 layer or a TiO2 layer; the double-layer dielectric layer consists of any two of the A12O3 layer, an SiO2 layer or a TiO2 layer; the scratch-resistant layer has an amorphous structure and is made of (Ti100-mTem)nB100-n, m ranges from 0 to 25, n ranges from 40 to 60, and Te comprises Cr or Ni. The invention also discloses simple technologies for manufacturing the front surface mirror.

Description

technical field [0001] The invention relates to the field of mirror preparation, in particular to a corrosion-resistant and highly reflective front mirror with a laminated structure and a preparation method thereof. Background technique [0002] Mirrors are objects used to reflect light and have important applications in many fields. Such as car rearview mirrors, vanity mirrors in bathrooms, reflectors on scientific instruments and equipment, periscopes on submarines, etc., reflectors in electronic equipment such as flat panel displays, projection TVs, scanners, copiers, etc. [0003] Most mirrors are constructed by depositing a metal such as silver, aluminum or chromium on a glass substrate to form a reflective layer, and then coating the reflective layer with a protective layer such as polymer, metal oxide or oxynitride to protect the reflective layer from damage. Effects of mechanical, chemical and other corrosion. This kind of mirror generally has a reflective layer on...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B1/14C03C17/36
CPCC03C17/3618C03C17/3642C03C17/3644C03C17/3652C03C17/3663C03C2218/156
Inventor 黄峰李朋孟凡平葛芳芳
Owner NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI