Micro-nano machining method and device for laser composite ejection liquid beam

Abstract

The invention discloses a micro-nano machining method and a micro-nano machining device for a laser composite ejection liquid beam, and belongs to the technical field of micro-nano processing techniques. The micro-nano machining device comprises a laser pulse sequence regulator (1), a laser system (2), a laser beam adjusting system (3), a visible light transmission reflector (4), a laser beam and ejection liquid beam coaxial observation regulation system (5), a focusing lens (6), a regulating and control device (7), an ejection device (8), a micro-nano working table (9), an ejection liquid filtering circulation system (10), a laser power supply (11) and an overall control system power supply (12). The micro-nano machining method comprises a step of implementing micro-nano machining on a workpiece by taking laser beams generated from the laser system (2) and ejection liquid beams generated from the ejection device (8). The micro-nano machining method and the micro-nano machining device are applicable to machining of engine blade film holes.

Description

Technical field [0001] The invention belongs to the technical field of micro-nano processing, and in particular relates to a method and device for micro-nano processing with a laser composite jet liquid beam with a large aspect ratio. The maximum aspect ratio can reach 20:1. The micro-nano processing method and device are suitable for engines Processing of air film holes in blades. Background technique [0002] The development of modern aviation and navigation technology promotes the continuous update of aero engines and large gas turbines. Engines with large thrust-to-weight ratio and high power-to-weight ratio mean higher vortex front temperatures. Therefore, the engines generally use superalloys, titanium alloys or surface coatings. Ceramic-coated alloys are used as blade materials, and small-hole film cooling turbine blades are used for forced cooling to improve the heat resistance and reliability of the engine. The aperture of the air film hole of the blade is generally 0.2...

AI Technical Summary

Problems solved by technology

Conventional machining cannot process air film holes due to tool wear and limited position; EDM electrode fabrication and repair is difficult, machining efficiency is low, machining dimensional accuracy is uncontrollable, surface roughness is low, there are many burrs, and regeneration will occur. Coating; the processing efficiency of jet liquid beam processing is low, the processing roughness is poor, and special-shaped holes cannot be processed; after conventional laser processing and short pulse laser processing, re-plating or even microcracks will inevitably occur, and there is a heat-affected zone after processing, which is small There is accumulation of tumor at the port below the hole, and the abrasive flow is difficult to remove; the processing efficiency of femtosecond laser processing is low

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