Corrosion-resistant and wear-resistant composite coating for metal surface and preparing method thereof
A composite coating, metal surface technology, applied in the direction of metal material coating process, coating, gaseous chemical plating, etc., can solve the problems of poor corrosion resistance and wear resistance, and improve corrosion resistance and wear resistance. Good continuity and uniform coating effect
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Embodiment 1
[0017] Using titanium alloy TC4 as the metal / alloy substrate, the titanium alloy TC4 was first polished and cleaned, then placed in the atomic layer deposition reaction chamber, and the chamber was evacuated; fumaric acid and trimethylaluminum (TMA ) as the source, and the source temperatures are 170°C and 35°C respectively; with Ar as the carrier gas, the temperature of the reaction chamber is set at 200°C, and a 50 nm thick Al-fumaric acid hybrid film is deposited; then the titanium alloy sample is placed In a tube furnace, it was annealed at 600 °C for 1 h in a vacuum environment to obtain an Al-doped carbon coating, that is, an Al-C coating; finally, the above sample was placed in an atomic layer deposition reaction chamber, and trimethyl Aluminum is the aluminum source, the source temperature is set to 35 °C, H 2 O was the oxygen source, 10 nm thick Al was deposited at 100 °C 2 o 3 , and finally form Al-C / Al on the surface of titanium alloy TC4 2 o 3 Composite coating...
Embodiment 2
[0020] Using titanium alloy TC4 as the metal / alloy substrate, the titanium alloy TC4 is first polished and cleaned, then loaded in the atomic layer deposition reaction chamber, and the chamber is evacuated; using fumaric acid and trimethylaluminum as the source , the source temperatures are 170°C and 30°C respectively; 2 As the carrier gas, the temperature of the reaction chamber was set at 300 °C, and a 200 nm thick Al-fumaric acid hybrid film was deposited; then the titanium alloy sample was placed in a tube furnace, and annealed at 600 °C for 1 h in a vacuum environment , to obtain an Al-doped carbon coating, that is, an Al-C coating; finally, the above sample was placed in an atomic layer deposition reaction chamber, with trimethylaluminum as the aluminum source, and the source temperature was set at 30 °C, H 2 O was the oxygen source, 10 nm thick Al was deposited at 100 °C 2 o 3 , to get the final Al-C / Al 2 o 3 Composite coating.
Embodiment 3
[0022] Using aluminum alloy as the metal / alloy substrate, the aluminum alloy is first polished and cleaned, then loaded in the atomic layer deposition reaction chamber, and the chamber is evacuated; with fumaric acid and trimethylaluminum as the source, the source The temperatures are 150°C and 35°C respectively; 2 As the carrier gas, the temperature of the reaction chamber is 180°C, and an 80nm-thick Al-fumaric acid hybrid film is deposited; then the aluminum alloy sample is placed in a tube furnace, annealed in a vacuum environment, and annealed at 500°C After 2 hours, the Al-doped carbon coating, that is, the Al-C coating was obtained; finally, the above sample was placed in the atomic layer deposition reaction chamber, with trimethylaluminum as the aluminum source, the source temperature was 35 ° C, H 2 O was the oxygen source, and 20 nm thick Al was deposited at 300 °C 2 o 3 , to obtain the final Al-C / Al surface of the aluminum alloy 2 o 3 Composite coating.
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