Common-reference detection and machining method of off-axis three-mirror aspheric optical system

Abstract

The invention discloses a common-reference detection and machining method of an off-axis three-mirror aspheric optical system. The method includes: firstly, machining of a main reflecting mirror and a third reflecting mirror are respectively performed until the RMS value of the full-aperture interference detection surface shape of each single reflecting mirror is greater than 1 / 10[Lambda], wherein Lambda refers to the laser interferometer operating wavelength; secondly, according to design parameters, an integrated backboard used for fixing the main reflecting mirror and the third reflecting mirror is designed and machined; thirdly, the main reflecting mirror and the third reflecting mirror are fixedly arranged on the integrated backboard, common-reference detection of the main reflecting mirror and the third reflecting mirror is performed, and the surface shapes of the main reflecting mirror and the third reflecting mirror are respectively obtained; fourthly, based on the surface shapes of the main reflecting mirror and the third reflecting mirror, which are obtained by common-reference detection, ion beam machining of the main reflecting mirror and the third reflecting mirror fixed on the integrated backboard is performed according to the design requirement; and fifthly, common-reference detection of the main reflecting mirror and the third reflecting mirror after ion beam machining is performed until the design requirement is satisfied. According to the method, the complicated assembling and adjusting processes of the off-axis three-mirror aspheric optical system can be avoided.

Description

technical field [0001] The invention belongs to the technical field of optical system processing and detection, and in particular relates to an off-axis three-mirror aspheric optical system common reference detection and processing method. Background technique [0002] In the optical system, the use of aspheric surfaces can correct aberrations, improve image quality, simplify the system structure, and reduce the weight of the system. Therefore, aspheric elements are being used more and more in deep space exploration, photoelectric tracking, astronomy Observation and many other optoelectronic equipment. Especially in the field of space optics, the off-axis triple anti-astigmatism aspheric system (TMA) has excellent characteristics such as fewer groups, long focal length, large field of view, wide band, high modulation transfer function, and strong ability to suppress stray light. Large-aperture aspheric elements have been widely used in space remote sensing. [0003] The op...

AI Technical Summary

Problems solved by technology

Each single mirror has its own geometric processing error, including vertex curvature radius error, off-axis error, and left and right position deviation of the mirror body, etc. During the assembly and adjustment of the entire system, it is necessary to repeatedly correct the component support backplane and frame mechanism , multiple iterative convergence is required to complete the assembly and adjustment of the entire system. The entire process of assembly and adjustment is complicated. Sometimes the processing errors of the main mirror and the third mirror do not match, and it is difficult for the entire optical system to achieve a good imaging effect.

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