Miniature single-circulation air-flowing type Z-axis PET angular velocity sensor

Abstract

The invention discloses a miniature single-circulation air-flowing type Z-axis PET angular velocity sensor. The miniature single-circulation air-flowing type Z-axis PET angular velocity sensor comprises a single-circulation air-flowing type Z-axis angular velocity chip, a PCB, a base, an outer shell, a buffered silicon sheet and lead wires, wherein the single-circulation air-flowing type Z-axis angular velocity chip comprises a PET cover plate, a silicon plate and a PET base; an air flow loop is arranged on the PET cover plate; a pair of parallel sensitive hot wires are arranged on the silicon plate; a piezoelectric ceramic oscillator and an air flow loop are arranged on the PET base; and the PET cover plate, the silicon plate and the PET base are sequentially connected to form the single-circulation air-flowing type Z-axis angular velocity chip. According to the miniature single-circulation air-flowing type Z-axis PET angular velocity sensor, the hot wires in a jet sensitive chamber is long and the resistance is large, the angular velocity output voltage is high when the same hot wire current is applied, the sensitivity is high, and the practicality is high; with air being sensitive mass, the miniature single-circulation air-flowing type Z-axis PET angular velocity sensor can resist high overload and strong impact; and the manufacturing cost is low and is only 1 / 10 of that of a total-silicon structure; a single-circulation airflow inside an enclosed space serves as an angular speed airflow sensitive body, and the angular velocity sensor has good stability and high sensitivity.

Description

technical field [0001] The invention relates to the technical field of detecting angular velocity and attitude parameters of a moving body by using the principle of Coriolis force, in particular to a miniature single-circulation airflow type Z-axis PET angular velocity sensor. Stabilization systems for micro-carriers such as drones, wearable devices, helmets, smart robots, cameras, etc. Background technique [0002] In the prior art, the micro angular velocity sensor represented by the micromechanical vibration angular velocity sensor is generally equipped with a solid frame or beam in the angular velocity chip, which has poor shock and vibration resistance, while the airflow angular velocity sensor uses gas as the sensitive mass and has a simple structure. The angular velocity sensor can be used to deflect the airflow sensitive body to realize the measurement of angular parameters. Therefore, this miniature angular velocity sensor is resistant to high overload, strong impac...

AI Technical Summary

Problems solved by technology

The high-sensitivity piezoelectric jet angular velocity sensor proposed in Chinese patent 89105999.7 is composed of a housing of a sensitive device, a nozzle body, a sensitive element, a piezoelectric pump, a pump seat, a disc spring, a lock nut, an external circuit system, and a mechanical system. The sensitive element of this kind of angular velocity sensor is made of copper, aluminum or stainless steel and other materials using traditional machining. The sensitive element is large in size and high in power, and cannot be used in the field of micro-carrier attitude measurement and control. Its hot wire is manually welded, which is difficult to guarantee. The parallelism and perpendicularity of the hot wires, so the cross-coupling is large, the consistency is poor, it is difficult to mass produce, and the cost is high

In the prior art, the MEMS process is used to etch the air flow network in the silicon wafer, but the process is complicated, the cost is high, and it is difficult to meet the design requirements; and the size of the air flow network is usually less than half of the thickness of the silicon wafer, because the thickness of the silicon wafer is only 300 μm Therefore, the scale of the airflow network is small, the gas capacity is small, the inertia it receives is small at the same angular velocity input, the deflection of the airflow beam is small, and the sensitivity of the angular velocity sensor is small; the effective deformation area of ​​the piezoelectric pump vibrator and the cross-sectional area of ​​the airflow network Consistent area, small size, weak ability to drive gas flow, small air velocity, low angular velocity sensor sensitivity

In addition, in the prior art, the airflow network fabricated on the silicon wafer is generally open, and the opening and inlet are the same as those of the outside world, which is easily affected by the external environment, and the stability of the angular velocity sensor is poor. Although the cost is low, the applicable conditions are harsh and practical. Not strong

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