A method for preparing a high-uniformity surface-enhanced Raman active substrate
A surface-enhanced Raman and active substrate technology, applied in Raman scattering, material excitation analysis, instruments, etc., to achieve high sensitivity, good uniformity, and high density
Active Publication Date: 2020-04-07
山东产研中科高端化工产业技术研究院有限公司
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However, the AAO template must be transferred to other substrates, so it is still a challenge to fabricate high-density ordered noble metal nanostructures in large areas.
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Embodiment 1
[0046] The application example of the present invention provides a schematic diagram of a method for preparing ultra-high-density ordered nanospheres based on atomic layer deposition. The schematic diagram of the preparation process is as follows figure 2 as shown,
[0047] (a) Preparation of ultra-high density ordered aluminum nanobowl (OAB) array template;
[0048] (b) Thermally vapor-deposit a layer of silver nanofilm on the surface of the OAB template;
[0049] (c) Put the obtained sample into the atomic layer deposition chamber and heat it to 250 °C, anneal for 1 h, dehumidify the silver thin film in solid state to form silver nanoparticles and embed them in the nanobowl of the template to form ultra-high-density ordered silver nanoparticles ball array;
[0050] (d) Precursor trimethylaluminum and water trimethylaluminum and water are introduced to deposit a layer of Al on the surface of silver nanoparticles 2 o 3 thin film, to obtain Ag-Al 2 o 3 Core-shell nanosph...
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Abstract
The embodiment of the invention provides a method for preparing a surface-enhanced raman activity substrate with high uniformity. The surface-enhanced raman activity substrate is prepared by thermally evaporating a silver film with the first preset thickness on the surface of an OAB array template sample of an ordered aluminum nanometer bowl; placing the OAB array template sample in an atomic layer deposition cavity and heating to 250 DEG C; dehumidifying the silver film in sold state so as to form an ordered silver nano ball array; filling precursor trimethyl aluminum and water in the atomic layer deposition cavity; depositing an Al2O3 film with a second preset thickness on the surface of the silver nano particile, and obtaining Ag-Al2O3 nuclear shell nano ball array structure; taking out the Ag-Al2O3 nuclear shell nano ball array structure from the atomic layer deposition cavity; thermally evaporating the silver film with a third preset thickness on the surface of the Ag-Al2O3 nuclear shell nano ball array structure, so as to form an ordered Ag-Al2O3-Ag uclear shell nano ball array structure as the surface raman activity substrate to detect a raman signal of a probe molecule. The technical scheme realizes the large-area preparation of ordered noble metal nano structural array with ultra-high density and uses the structural array as the surface-enhanced raman activity substrate.
Description
technical field [0001] The invention relates to the technical field of nanomaterial preparation, in particular to a method for preparing a high-uniformity surface-enhanced Raman active substrate. Background technique [0002] Raman scattering spectroscopy is a powerful molecular detection technique due to its specificity for molecular and chemical bond vibrational peaks. Surface-enhanced Raman scattering (SERS) is widely used in surface research, biosurface science, food safety and other fields because of its high sensitivity, rapid detection, and the ability to obtain structural information that is not easily obtained by conventional Raman spectroscopy. The SERS effect mainly exists in the gaps between metal nanostructures, that is, "hot spots". Due to the metal surface plasmon resonance effect, the electromagnetic field near the "hot spots" is greatly enhanced. Recent studies have shown that "hot spots" greatly enhance the SERS signal, have high sensitivity to the substan...
Claims
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IPC IPC(8): G01N21/65
CPCG01N21/658
Inventor 张璋曾志强苏绍强高兴森
Owner 山东产研中科高端化工产业技术研究院有限公司