Catalyst for producing trichlorosilane with silicon-hydrogen chlorination process, preparation method of catalyst and method for catalytically producing trichlorosilane

A technology of trichlorosilane and catalyst, applied in metal/metal oxide/metal hydroxide catalyst, organic compound/hydride/coordination complex catalyst, physical/chemical process catalyst, etc., can solve the decrease of synthesis efficiency , high reaction temperature and high energy consumption, to achieve the effect of increasing adsorption capacity, improving selectivity and reducing activation energy

Inactive Publication Date: 2017-02-08
INST OF PROCESS ENG CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] Restricted by technical conditions, the by-product SiCl in the existing synthesis 4 Excessive content, SiHCl 3 Selectivity is generally around 82% (CN101665254A, CN101279734B), resulting in a decline in synthesis efficiency, thereby further reducing SiHCl 3 The purity cannot meet the market demand and affect the development of the entire silicon industry chain
In addition, due to the high reaction temperature (300-400°C), the required energy consumption is relatively high
So far, low-temperature catalytic selective production of SiHCl using catalysts 3 The literature has not yet been reported

Method used

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  • Catalyst for producing trichlorosilane with silicon-hydrogen chlorination process, preparation method of catalyst and method for catalytically producing trichlorosilane
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  • Catalyst for producing trichlorosilane with silicon-hydrogen chlorination process, preparation method of catalyst and method for catalytically producing trichlorosilane

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Experimental program
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Effect test

Embodiment 1

[0049] The catalyst is 80wt% Cu+20wt% Zn, granular, with a particle size of 0.5-10 μm;

[0050] The catalyst is used to catalyze the method for producing trichlorosilane: in a fixed bed (the inner diameter of the reactor is 20cm, and the length is 50cm), add the homogeneous mixture of 20g Si powder and 0.02g catalyst earlier, pass into N 2 Purge the reaction system for 1 hour; then raise the temperature to 200°C, feed HCl, the flow rate is 15mL / min, the reaction pressure is 0.1MPa, and the reaction time is 4 hours; after the reaction product is condensed by the condenser tube, it is collected with toluene, and the excess tail gas is collected with alkali After the liquid was absorbed, it was emptied; the collected mixed solution was constant volume and then quantitatively analyzed by capillary gas chromatography (Agilent 7890A, KB-210 chromatographic column, TCD detector); SiHCl in the resulting product 3 The content of Si is 92.4%, and the conversion rate of Si is 42.8% (see ...

Embodiment 2

[0054] The catalyst is 80wt% Cu+20wt% Zn, granular, with a particle size of 0.5-10 μm;

[0055] The catalyst is used to catalyze the method for producing trichlorosilane: in a fixed bed (the inner diameter of the reactor is 20cm, and the length is 50cm), add the homogeneous mixture of 20g Si powder and 0.02g catalyst earlier, pass into N 2 Purge the reaction system for 1 hour; then raise the temperature to 300°C, feed HCl, the flow rate is 15mL / min, the reaction pressure is 1MPa, and the reaction time is 4 hours; the product after the reaction is collected with toluene after being condensed by a condenser tube, and the excess tail gas is collected with lye Empty after absorption; the collected mixed solution is quantitatively analyzed by capillary gas chromatography (Agilent 7890A, KB-210 chromatographic column, TCD detector) after constant volume; SiHCl in the resulting product 3 The content of Si is 91.8%, and the conversion rate of Si is 54.1% (see Table 1).

Embodiment 3

[0057] The catalyst is 80wt% Cu+20wt% Zn, granular, with a particle size of 0.5-10 μm;

[0058] The catalyst is used to catalyze the method for producing trichlorosilane: in a fixed bed (the inner diameter of the reactor is 20cm, and the length is 50cm), add the homogeneous mixture of 20g Si powder and 0.02g catalyst earlier, pass into N 2Purge the reaction system for 1 hour; then raise the temperature to 400°C, feed HCl, the flow rate is 15mL / min, the reaction pressure is 2MPa, and the reaction time is 4 hours; the product after the reaction is collected with toluene after being condensed by a condenser tube, and the excess tail gas is collected with lye Empty after absorption; the collected mixed solution is quantitatively analyzed by capillary gas chromatography (Agilent 7890A, KB-210 chromatographic column, TCD detector) after constant volume; SiHCl in the resulting product 3 The content of Si is 90.5%, and the conversion rate of Si is 75.6% (see Table 1).

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Abstract

The invention provides a catalyst for producing trichlorosilane with a silicon-hydrogen chlorination process, a preparation method of the catalyst and a method for catalytically producing the trichlorosilane. The catalyst is prepared from copper-based active ingredients and selectable additives; or the catalyst is prepared from a copper elementary substance and additives; the copper-based active ingredients comprise coppery oxide and/or copper salt, or the combination of the copper elementary substance and the coppery oxide and/or the copper salt; and the particle size of the catalyst is 0.5 to 100 microns. According to the catalyst, the selectivity of the trichlorosilane and the conversion rate of silica powder raw material can be obviously improved, the ingredients are simple, the catalyst is easy for industrial preparation and is free of pollution to the environment, reaction conditions for catalytically producing the trichlorosilane with the silicon-hydrogen chlorination process is mild, and a reaction is easy to control.

Description

technical field [0001] The invention belongs to the technical field of chemical industry, relates to a catalyst and its preparation method and corresponding catalytic reaction, in particular to a catalyst for producing trichlorosilane by hydrochlorination of silicon, its preparation method and its catalytic method for producing trichlorosilane method. Background technique [0002] Polycrystalline silicon material is an extremely important intermediate product in the silicon product industry chain, and is the most important and basic functional material in the semiconductor industry, electronic information industry, and solar photovoltaic cell industry, while trichlorosilane (SiHCl 3 ) is the main raw material for the manufacture of polysilicon, in addition, it is also an important intermediate for the production of silane coupling agents and other organosilicon products. In recent years, with the development of my country's economy, especially the rapid development of semic...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01J23/72B01J23/745B01J23/755B01J23/80B01J23/835B01J23/888B01J23/889B01J27/122B01J27/138B01J27/18B01J31/28B01J35/02B01J35/10C01B33/107
CPCB01J23/72B01J23/745B01J23/755B01J23/80B01J23/835B01J23/888B01J23/8892B01J27/122B01J27/138B01J27/1817B01J31/28B01J35/026B01J35/1071C01B33/10763
Inventor 苏发兵纪永军王光娜于静
Owner INST OF PROCESS ENG CHINESE ACAD OF SCI
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