Electrode Thin Film Process Technology for Uncooled Focal Plane Detector Packaging

Abstract

The invention relates to an electrode thin-film process technology for packaging of an uncooled focal plane detector, in particular to the electrode thin-film process technology for packaging of the uncooled focal plane detector with high reliability and long service life. According to the process technology, five layers of metal films are sequentially deposited on a detector window, wherein the first layer is a chrome film, the second layer is a chrome-nickel alloy film, the third layer is a nickel film, the fourth layer is a nickel-gold film, and the fifth layer is a gold film; the second layer and the fourth layer are alloy films, that is, two different types of thin films are grown simultaneously between the first-layer film and the third-layer film as well as between the third-layer film and the fifth-layer film, so that the two metal films interdiffuse, the strength between all layers of films is high, no cavities are generated after welding, the service life of an assembly is prolonged, and the reliability of the assembly is improved. A transition layer is arranged between every two adjacent electrode films to increase adhesive force between the layers. After welding, solder and the welding layers interdiffuse, no cavities are generated after welding, the service life of the assembly is prolonged, and the reliability of the assembly is improved.

Description

technical field [0001] The invention relates to an unrefrigerated focal plane detector, in particular to an electrode film technology for packaging an unrefrigerated focal plane detector with high reliability and long life. Background technique [0002] Since the uncooled focal plane detector has the advantages of no refrigeration, low cost, low power consumption, light weight, miniaturization, fast start-up, convenient use, and flexibility, it has developed from small-scale to medium- and large-scale 320×240 And 640×480 array, in the next few years, it is expected to obtain a large-scale 1024×1024 uncooled focal plane array, and the pixel size is also reduced from 50um to 17um, which further improves the focal plane sensitivity. This uncooled focal plane detector is more and more widely used in military and civilian fields, and some models have been equipped with troops, especially in light weapon sights, driver vision enhancers, individual helmet sights, handheld thermal i...

AI Technical Summary

Problems solved by technology

[0005] What the present invention aims to solve is the problem of defilming between the film systems and voids in each film system during the high-temperature welding process of the existing electrode film, and provides a non-refrigerated focal plane detector with high reliability and long life. Electrode film technology for packaging