Novel trench gate IGBT (insulated gate bipolar transistor) provided with gate embedded diode and preparation method of novel trench gate IGBT
A diode and trench gate technology, applied in the field of trench gate IGBT and its preparation, can solve the problems of increasing gate leakage current, contamination, complexity, etc., and achieve the effect of improving control and reducing gate resistance
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[0036] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present invention.
[0037] Please refer to Figure 1 ~ Figure 2 , figure 1 It is a schematic structural diagram of a specific implementation of a method for manufacturing a novel trench gate IGBT with a gate embedded diode according to an embodiment of the present invention; figure 2 It is a schematic structural diagram of another specific implementation of a method for manufacturing a novel trench gate IGBT with a gate embedded diode provided by an embodim...
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