Environment-friendly deplating liquid for ruthenium plating and deplating method

A deplating solution and an environment-friendly technology, which is applied in the field of environment-friendly ruthenium coating deplating solution and its deplating, can solve problems such as corrosion of equipment and workshops, serious environmental pollution, over-corrosion of the substrate, etc., achieve low cost and improve the working environment , surface bright effect

Inactive Publication Date: 2017-03-15
FOSHAN UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the traditional deplating process, the deplating solution containing high concentration of sulfuric acid and nitric acid is usually used. The above deplating solution contains a strong oxidant and has strong acidity, so it is very easy to have an adverse effect on the substrate itself during deplating.
In addition, concentrated nitric acid reacts with copper, which is both a strong oxidant and an acid, and produces a large amount of harmful gas, commonly known as "Huanglong", which seriously pollutes the environment, does great harm to the human body, and also produces great harm to equipment and workshops. corrosion

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0020] Stripping solution of the present invention is used to strip the stripping method of ruthenium coating, and step is:

[0021] 1. Surface treatment: immerse the plated parts in lye at 60°C for 3 minutes;

[0022] The lye is an aqueous solution, which contains: sodium carbonate: 28g / L, sodium phosphate: 28g / L, sodium dodecylbenzenesulfonate: 5g / L;

[0023] 2. Washing with water: wash and dry the waste after finishing alkali washing, and set aside;

[0024] 3. Deplating: Immerse the dried plated parts into the deplating solution containing 150g sodium p-nitrobenzoate / L, 10g ammonium acetate / L, 10mL propanol / L, 100mL glycerol / L, and the balance is water Deplating is carried out in the middle; the deplating condition is room temperature; stirring is required during the deplating process, and the deplating time is 3 minutes;

[0025] 4. Take out the waste, rinse with deionized water, rinse and dry.

Embodiment 2

[0027] Stripping solution of the present invention is used to strip the stripping method of ruthenium coating, and step is:

[0028] 1. Surface treatment: immerse the plated parts in lye at 65°C for 2 minutes;

[0029] The lye is an aqueous solution, which contains: sodium carbonate: 30g / L, sodium phosphate: 30g / L, sodium dodecylbenzenesulfonate: 6g / L;

[0030] 2. Washing with water: wash and dry the waste after finishing alkali washing, and set aside;

[0031] 3. Deplating: Immerse the dried plated parts into the deplating solution containing 200g sodium p-nitrobenzoate / L, 20g ammonium acetate / L, 20mL propanol / L, 125mL glycerol / L, and the balance is water Deplating is carried out in the middle; the deplating condition is room temperature; stirring is required during the deplating process, and the deplating time is 2 minutes;

[0032] 4. Take out the waste, rinse with deionized water, rinse and dry.

Embodiment 3

[0034] Stripping solution of the present invention is used to strip the stripping method of ruthenium coating, and step is:

[0035] 1. Surface treatment: immerse the plated parts in lye at 70°C for 2 minutes;

[0036] The lye is an aqueous solution, which contains: sodium carbonate: 35g / L, sodium phosphate: 35g / L, sodium dodecylbenzenesulfonate: 8g / L;

[0037] 2. Washing with water: wash and dry the waste after finishing alkali washing, and set aside;

[0038] 3. Deplating: Immerse the dried plated parts into the deplating solution containing 250g sodium p-nitrobenzoate / L, 30g ammonium acetate / L, 30mL propanol / L, 150mL glycerol / L, and the balance is water Deplating is carried out in the middle; the deplating condition is room temperature; stirring is required during the deplating process, and the deplating time is 2 minutes;

[0039] 4. Take out the waste, rinse with deionized water, rinse and dry.

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PUM

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Abstract

The invention relates to environment-friendly deplating liquid for a ruthenium plating and a deplating method of the ruthenium plating. Each liter of deplating liquid comprises, by mass concentration, 150-250 g / L of sodium p nitrobenzoate, 10-30 g / L of ammonium acetate, 10-30 ml / L of propyl alcohol and 100-150 ml / L of glycerin. The matrix color of the deplating liquid is basically constant after deplating, the deplating liquid is stable, the plating is removed completely and efficiently, and the process is simple; and the matrix surface of a plating piece is free of corrosion, no harmful gas is generated, the using period is long, the cost can be reduced, and the socially multi-requirement environment-friendly saving purpose is met.

Description

technical field [0001] The invention relates to the technical field of electroplating, in particular to an environment-friendly deplating solution for ruthenium coating and a deplating method thereof. Background technique [0002] Unqualified coatings will be produced during the electroplating process, and coatings will also be deposited on the racks supporting the plated parts; the former needs to be recycled, and the latter needs to be used repeatedly, so the coating needs to be completely removed. The deplating solution is usually suitable for the stripping of the ruthenium plating layer on the substrate surface. In the traditional deplating process, the deplating solution containing high concentration of sulfuric acid and nitric acid is usually used. The above deplating solution contains a strong oxidant and has strong acidity, so it is very easy to have an adverse effect on the substrate itself during deplating. . In addition, concentrated nitric acid reacts with copp...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23G5/032
CPCC23G5/032
Inventor 杨富国杨飞张玉红
Owner FOSHAN UNIVERSITY
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