Highly-integrated Langmuir probe diagnosis system and method

A Langmuir probe, a high-integration technology, applied in the field of ion plasma diagnosis, can solve the problems of low integration, poor real-time and precision of measurement, etc., to ensure real-time performance, improve reliability, reduce Effects of cost and volume

Inactive Publication Date: 2017-04-19
HUAZHONG UNIV OF SCI & TECH
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Problems solved by technology

[0004] Aiming at the defects of the prior art, the purpose of the present invention is to provide a highly integrated Langmuir probe diagnostic s

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  • Highly-integrated Langmuir probe diagnosis system and method
  • Highly-integrated Langmuir probe diagnosis system and method
  • Highly-integrated Langmuir probe diagnosis system and method

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[0033] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

[0034] The present invention provides a highly integrated Langmuir probe diagnosis system and method, which are used to quickly measure the probe volt-ampere characteristic curve (hereinafter referred to as I-V curve) multiple times in a plasma diagnosis, and automatically analyze and obtain the electron density , ion density, plasma potential, levitation potential, electron temperature and electron energy distribution and other relevant plasma parameters. The invention can realize rapid multiple collection of I-V curves in one plasma discharge, and automatically process and analyze to obtain relev...

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Abstract

The invention discloses a highly-integrated Langmuir probe diagnosis system and method. The highly-integrated Langmuir probe diagnosis system comprises a Langmuir probe, a trigger, a scanning power supply, a data acquisition unit and a data processing unit. The trigger transmits a pulse trigger signal to the scanning power supply via an optical fiber to trigger generation of sawtooth voltage with designated amplitude, period and repeat account, and the sawtooth voltage is loaded onto the Langmuir probe; the data acquisition unit carries out rapid, multiple and synchronous acquisition and storage on the voltage and current data of the Langmuir probe; and after completion of data acquisition, all the results are sent to the data processing unit in one shot, a data processing program on a computer is employed for automatic processing and analysis, and an acquired volt-ampere characteristic curve and acquired plasma parameters are displayed. The highly-integrated Langmuir probe diagnosis system has high automation degree and integrated level, can realize high-speed synchronous data acquisition and large-quantity data storage and communication, employs data processing for automatic processing and analysis of acquired data and provides a good man-machine interaction interface for displaying and recording of processing results.

Description

technical field [0001] The invention belongs to the technical field of plasma diagnosis, and more specifically relates to a highly integrated Langmuir probe diagnosis system and method. Background technique [0002] Commonly used plasma diagnosis methods include emission spectroscopy, Langmuir probe, laser induction, microwave interference, etc. Langmuir probe is an important diagnostic tool for plasma parameters. Compared with other methods, it has the advantages of simple structure and principle, and can measure various plasma parameters. Its basic principle is to extend a small metal probe into the plasma, apply a negative to positive scanning voltage to the probe, attract ions and electrons in the plasma, and form a current on the probe. By measuring the voltage and current of the probe, obtaining the I-V curve of the probe and performing analysis and calculation, the relevant plasma parameters can be obtained. [0003] The current Langmuir probe diagnostic system has ...

Claims

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Application Information

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IPC IPC(8): G01N27/00
CPCG01N27/00
Inventor 赵鹏李冬秦斌陈德智李小飞
Owner HUAZHONG UNIV OF SCI & TECH
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