A photonic crystal nanofluid sensor, its preparation method and application

Abstract

The present invention belongs to the sensor field and discloses a micro-electro-mechanical system-based photonic crystal nano-fluid sensor. The micro-electro-mechanical system-based photonic crystal nano-fluid sensor includes a photoresist layer, a silicon wafer substrate, a first refractive index material film layer, a second refractive index material film layer and a polymer material sealing layer; the top of the second refractive index material film layer is provided with a square waveform gate structure; the gate structure includes a plurality of through grooves and a plurality of protrusions, wherein the through grooves and the protrusions are arranged alternately; the photoresist layer, the silicon wafer substrate, the first refractive index material film layer and the second refractive index material film layer commonly form a sensor base body layer; and a fluid inlet and a fluid outlet are arranged on the sensor base body layer. The sensor of the invention is a photonic crystal-based nano-fluid sensor. With the sensor adopted, the problems of high quantity of consumed detection objects, long detection time and low test precision of a traditional photonic crystal sensor can be solved, and the problems of functional singleness, instable structure and few channels of a traditional nano-fluid sensor can be solved.

Description

technical field [0001] The invention belongs to the field of sensors, and more specifically relates to a photonic crystal nanofluid sensor, its preparation method and application. Background technique [0002] Photonic crystals and nanofluidic channels are two types of emerging sensors that are widely researched and applied in the fields of biochemistry, life science and medicine. A photonic crystal is a periodic grating structure composed of materials with different refractive index, and the middle layer is composed of a material with a relatively high refractive index. Depending on the material, grating period, and photonic crystal structure, and due to the existence of the photonic band gap, the photonic crystal can resonate with the light wave of a specific frequency to change the propagation direction of the resonant wave; at the same time, the light wave that resonates with the photonic crystal can make Local electric field enhancement of grating structures. The phot...

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Problems solved by technology

[0003] However, the shortcomings of photonic crystal sensors are that the detection takes a long time and the limit detection concentration is not high, especially in the field of molecular binding such as bioprotein molecules, antigens and gene detection; at the same time, the fabrication of nanofluidic channel structures Strict requirements, with the characteristics of difficult preparation, high cost, and low yield

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