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Tool provided with diamond/silicon carbide composite coating and preparation method thereof

A technology of diamond coating and composite coating, which is applied in the direction of metal material coating process, coating, gaseous chemical plating, etc., can solve the problems of poor fracture toughness, insufficient adhesion between diamond coating and tool substrate, and achieve The effect of resisting shear stress, reducing thermal stress and increasing bonding strength

Active Publication Date: 2017-06-13
SHENZHEN INST OF ADVANCED TECH CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] In view of this, the present invention provides a tool with a diamond / silicon carbide composite coating, which forms a multilayer coating structure by alternately depositing silicon carbide-diamond composite coatings and diamond coatings on the tool substrate to solve the problem of The problem of insufficient adhesion and poor fracture toughness of existing diamond coatings to tool substrates (especially cemented carbide substrates)

Method used

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  • Tool provided with diamond/silicon carbide composite coating and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0040] A method for preparing a tool with a diamond / silicon carbide composite coating, comprising the following steps:

[0041] (1) With the YG8 (WC-8% Co) cemented carbide end mill sold on the domestic market as the tool substrate, it is carried out sandblasting pretreatment, injection pressure 200kPa, silicon carbide sand particle size 300 orders, then respectively in acetone Ultrasonic cleaning the cemented carbide substrate with alcohol for 15 minutes to obtain the cleaned substrate;

[0042] Put the above matrix in H 2 SO 4 :H 2 o 2 = Immerse in a solution of 1:10 (volume ratio) for 1 minute, chemically etch cobalt, wash and dry, and then in the alcohol suspension containing diamond nanopowder, sonicate the surface of the tool substrate for 30 minutes to inoculate Diamond pre-nucleation, cleaning with alcohol after taking it out, and finally blowing dry with nitrogen to obtain the inoculated matrix;

[0043] (2) Put the cemented carbide substrate after the inoculatio...

Embodiment 2

[0048] A method for preparing a tool with a diamond / silicon carbide composite coating, comprising the following steps:

[0049] (1) With the YG6X (WC-6% Co) cemented carbide micro-drill bit sold on the domestic market as the tool substrate, it is carried out sandblasting pretreatment, injection pressure 200kPa, silicon carbide sand particle size 300 orders, then respectively in acetone and Ultrasonic cleaning of the cemented carbide substrate in alcohol for 15 minutes to obtain the cleaned substrate;

[0050] Place the above-mentioned cleaned substrate in an alcohol suspension containing diamond nanopowder, ultrasonicate the surface of the tool substrate for 30 minutes to inoculate the diamond pre-nucleation, take it out, wash it with alcohol, and dry it with nitrogen to obtain the inoculated diamond. matrix;

[0051] (2) Put the inoculated cemented carbide substrate into the vacuum chamber of the hot wire chemical vapor deposition equipment, and use the hot wire chemical vap...

Embodiment 3

[0055] A method for preparing a tool with a diamond / silicon carbide composite coating, comprising the following steps:

[0056] (1) Si sold on the domestic market 3 N 4 The milling blade is used as the tool substrate, and it is subjected to sandblasting pretreatment, the injection pressure is 200kPa, the silicon carbide sand particle size is 300 mesh, and then the cemented carbide substrate is ultrasonically cleaned in acetone and alcohol for 15 minutes to obtain the cleaned substrate;

[0057] Put the above-mentioned cleaned substrate in the diamond suspension and ultrasonically for 20 minutes, take it out, wash it with alcohol, and dry it with nitrogen to obtain the substrate after inoculation treatment;

[0058] (2) Put the inoculated cemented carbide substrate into the vacuum chamber of the hot wire chemical vapor deposition equipment, and use the hot wire chemical vapor deposition method to deposit the silicon carbide / diamond composite coating. Introduce hydrogen into t...

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Abstract

The invention provides a tool provided with a diamond / silicon carbide composite coating. The tool provided with the diamond / silicon carbide composite coating comprises a base body, and a multi-layer coating structure, wherein the multi-layer coating structure is arranged on the base body. The multi-layer coating structure comprises the silicon carbide / diamond composite coating and a diamond coating. The silicon carbide / diamond composite coating and the diamond coating are sequentially and alternately arranged upwards from the surface of the base body to form the multi-layer coating structure; and the diamond coating is arranged on the top layer of the multi-layer coating structure. Each layer of the multi-layer coating structure can achieve continuous growth of the diamond phase, and accordingly the interface bonding strength between the layers is strengthened, the internal stress of the coatings can be reduced effectively, the adhesion between a thin film and the base body can be strengthened, and particularly the multi-layer coating structure is beneficial for resisting the strong shear stress generated in the cutting process of the tool. In addition, the overall fracture toughness in the thickness direction of the coatings can be strengthened. The invention also provides a production method of the tool provided with the diamond coating.

Description

technical field [0001] The invention relates to the technical field of chemical vapor deposition diamond coatings, in particular to a tool with a diamond / silicon carbide composite coating and a preparation method thereof. Background technique [0002] As the hardest material known in the world, diamond is regarded as an ideal coating material for cutting tools and mechanical components. Growing diamond on a substrate such as cemented carbide (WC-Co) can greatly improve the resistance of tools and components. abrasiveness, processing efficiency, etc. The growth of diamond by chemical deposition requires extremely harsh conditions. At the same time, metal cobalt (Co) as a binder phase in cemented carbide will inhibit its growth during the growth of the diamond coating, making the surface of the substrate form a non-diamond phase. In addition, on the interface between the diamond coating and the substrate, there are tiny pores between the diamond grains and the substrate, whic...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/02C23C16/27C23C16/30
CPCC23C16/0227C23C16/0254C23C16/0272C23C16/271C23C16/30
Inventor 唐永炳王陶张文军李振声
Owner SHENZHEN INST OF ADVANCED TECH CHINESE ACAD OF SCI
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